5/2/2011	9:08:58 AM	Run aborted at 9:08 AM
5/2/2011	9:08:58 AM	Helium valve closed
5/2/2011	9:08:58 AM	H2 valve closed
5/2/2011	9:08:58 AM	BCl3 valve closed
5/2/2011	9:08:58 AM	PH3 valve closed
5/2/2011	9:08:58 AM	SiCl4 pre valve closed
5/2/2011	9:08:58 AM	SiCl4 post valve closed
5/2/2011	9:08:58 AM	Bypass valve closed
5/2/2011	9:08:58 AM	Main Vac valve closed
5/2/2011	9:08:58 AM	Bubbler valve closed
5/2/2011	9:08:58 AM	Helium MFC set to  0.000000
5/2/2011	9:08:58 AM	H2 MFC set to  0.000000
5/2/2011	9:08:58 AM	BCl3 MFC set to  0.000000
5/2/2011	9:08:58 AM	PHl3 MFC set to  0.000000
5/2/2011	9:08:58 AM	SiCl4 MFC set to  0.000000
5/2/2011	9:08:58 AM	Tube furnace set to 0
5/2/2011	9:22:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	9:22:39 AM	Recipe started at 9:22 AM
5/2/2011	9:22:39 AM	Helium valve closed
5/2/2011	9:22:39 AM	H2 valve closed
5/2/2011	9:22:39 AM	BCl3 valve closed
5/2/2011	9:22:39 AM	PH3 valve closed
5/2/2011	9:22:39 AM	SiCl4 pre valve closed
5/2/2011	9:22:39 AM	SiCl4 post valve closed
5/2/2011	9:22:39 AM	Main Vac valve closed
5/2/2011	9:22:39 AM	Bubbler valve closed
5/2/2011	9:22:39 AM	Bypass valve opened
5/2/2011	9:22:39 AM	Helium MFC set to  0.000000
5/2/2011	9:22:39 AM	H2 MFC set to  0.000000
5/2/2011	9:22:39 AM	BCl3 MFC set to  0.000000
5/2/2011	9:22:39 AM	PHl3 MFC set to  0.000000
5/2/2011	9:22:39 AM	SiCl4 MFC set to  0.000000
5/2/2011	9:22:39 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	9:22:39 AM	Tube furnace set to 0
5/2/2011	9:23:11 AM	Helium valve closed
5/2/2011	9:23:11 AM	H2 valve closed
5/2/2011	9:23:11 AM	BCl3 valve closed
5/2/2011	9:23:11 AM	PH3 valve closed
5/2/2011	9:23:11 AM	SiCl4 pre valve closed
5/2/2011	9:23:11 AM	SiCl4 post valve closed
5/2/2011	9:23:11 AM	Bubbler valve closed
5/2/2011	9:23:11 AM	Main Vac valve opened
5/2/2011	9:23:11 AM	Bypass valve opened
5/2/2011	9:23:11 AM	Helium MFC set to  0.000000
5/2/2011	9:23:11 AM	H2 MFC set to  0.000000
5/2/2011	9:23:11 AM	BCl3 MFC set to  0.000000
5/2/2011	9:23:11 AM	PHl3 MFC set to  0.000000
5/2/2011	9:23:11 AM	SiCl4 MFC set to  0.000000
5/2/2011	9:23:11 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	9:23:11 AM	Tube furnace set to 0
5/2/2011	9:23:12 AM	Run finished at 9:23 AM
5/2/2011	9:23:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	10:37:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/2/2011	10:37:50 AM	Recipe started at 10:37 AM
5/2/2011	10:37:50 AM	H2 valve closed
5/2/2011	10:37:50 AM	BCl3 valve closed
5/2/2011	10:37:50 AM	PH3 valve closed
5/2/2011	10:37:50 AM	SiCl4 pre valve closed
5/2/2011	10:37:50 AM	SiCl4 post valve closed
5/2/2011	10:37:50 AM	Main Vac valve closed
5/2/2011	10:37:50 AM	Bypass valve closed
5/2/2011	10:37:50 AM	Bubbler valve closed
5/2/2011	10:37:50 AM	Helium valve opened
5/2/2011	10:37:50 AM	Helium MFC set to  500.000000
5/2/2011	10:37:50 AM	H2 MFC set to  0.000000
5/2/2011	10:37:50 AM	BCl3 MFC set to  0.000000
5/2/2011	10:37:50 AM	PHl3 MFC set to  0.000000
5/2/2011	10:37:50 AM	SiCl4 MFC set to  0.000000
5/2/2011	10:37:50 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	10:37:51 AM	Tube furnace set to 0
5/2/2011	10:39:11 AM	Helium valve closed
5/2/2011	10:39:11 AM	H2 valve closed
5/2/2011	10:39:11 AM	BCl3 valve closed
5/2/2011	10:39:11 AM	PH3 valve closed
5/2/2011	10:39:11 AM	SiCl4 pre valve closed
5/2/2011	10:39:11 AM	SiCl4 post valve closed
5/2/2011	10:39:11 AM	Main Vac valve closed
5/2/2011	10:39:11 AM	Bypass valve closed
5/2/2011	10:39:11 AM	Bubbler valve closed
5/2/2011	10:39:11 AM	Helium MFC set to  0.000000
5/2/2011	10:39:11 AM	H2 MFC set to  0.000000
5/2/2011	10:39:11 AM	BCl3 MFC set to  0.000000
5/2/2011	10:39:11 AM	PHl3 MFC set to  0.000000
5/2/2011	10:39:11 AM	SiCl4 MFC set to  0.000000
5/2/2011	10:39:11 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	10:39:11 AM	Tube furnace set to 0
5/2/2011	10:39:11 AM	Run finished at 10:39 AM
5/2/2011	10:39:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/2/2011	10:53:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	10:53:58 AM	Recipe started at 10:53 AM
5/2/2011	10:53:58 AM	Helium valve closed
5/2/2011	10:53:58 AM	H2 valve closed
5/2/2011	10:53:58 AM	BCl3 valve closed
5/2/2011	10:53:58 AM	PH3 valve closed
5/2/2011	10:53:58 AM	SiCl4 pre valve closed
5/2/2011	10:53:58 AM	SiCl4 post valve closed
5/2/2011	10:53:58 AM	Main Vac valve closed
5/2/2011	10:53:58 AM	Bubbler valve closed
5/2/2011	10:53:58 AM	Bypass valve opened
5/2/2011	10:53:58 AM	Helium MFC set to  0.000000
5/2/2011	10:53:58 AM	H2 MFC set to  0.000000
5/2/2011	10:53:58 AM	BCl3 MFC set to  0.000000
5/2/2011	10:53:58 AM	PHl3 MFC set to  0.000000
5/2/2011	10:53:58 AM	SiCl4 MFC set to  0.000000
5/2/2011	10:53:58 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	10:53:58 AM	Tube furnace set to 0
5/2/2011	10:54:31 AM	Helium valve closed
5/2/2011	10:54:31 AM	H2 valve closed
5/2/2011	10:54:31 AM	BCl3 valve closed
5/2/2011	10:54:31 AM	PH3 valve closed
5/2/2011	10:54:31 AM	SiCl4 pre valve closed
5/2/2011	10:54:31 AM	SiCl4 post valve closed
5/2/2011	10:54:31 AM	Bubbler valve closed
5/2/2011	10:54:31 AM	Main Vac valve opened
5/2/2011	10:54:31 AM	Bypass valve opened
5/2/2011	10:54:31 AM	Helium MFC set to  0.000000
5/2/2011	10:54:31 AM	H2 MFC set to  0.000000
5/2/2011	10:54:31 AM	BCl3 MFC set to  0.000000
5/2/2011	10:54:31 AM	PHl3 MFC set to  0.000000
5/2/2011	10:54:31 AM	SiCl4 MFC set to  0.000000
5/2/2011	10:54:31 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	10:54:31 AM	Tube furnace set to 0
5/2/2011	10:54:31 AM	Run finished at 10:54 AM
5/2/2011	10:54:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	10:55:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/2/2011	10:55:20 AM	Recipe started at 10:55 AM
5/2/2011	10:55:20 AM	Helium valve closed
5/2/2011	10:55:20 AM	H2 valve closed
5/2/2011	10:55:20 AM	BCl3 valve closed
5/2/2011	10:55:20 AM	PH3 valve closed
5/2/2011	10:55:20 AM	SiCl4 pre valve closed
5/2/2011	10:55:20 AM	SiCl4 post valve closed
5/2/2011	10:55:20 AM	Main Vac valve closed
5/2/2011	10:55:20 AM	Bypass valve closed
5/2/2011	10:55:20 AM	Bubbler valve closed
5/2/2011	10:55:20 AM	Helium MFC set to  0.000000
5/2/2011	10:55:20 AM	H2 MFC set to  0.000000
5/2/2011	10:55:20 AM	BCl3 MFC set to  0.000000
5/2/2011	10:55:20 AM	PHl3 MFC set to  0.000000
5/2/2011	10:55:20 AM	SiCl4 MFC set to  0.000000
5/2/2011	10:55:20 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	10:55:21 AM	Tube furnace set to 0
5/2/2011	10:55:21 AM	Run finished at 10:55 AM
5/2/2011	10:55:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/2/2011	10:55:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	10:55:37 AM	Recipe started at 10:55 AM
5/2/2011	10:55:37 AM	Helium valve closed
5/2/2011	10:55:37 AM	H2 valve closed
5/2/2011	10:55:37 AM	BCl3 valve closed
5/2/2011	10:55:37 AM	PH3 valve closed
5/2/2011	10:55:37 AM	SiCl4 pre valve closed
5/2/2011	10:55:37 AM	SiCl4 post valve closed
5/2/2011	10:55:37 AM	Main Vac valve closed
5/2/2011	10:55:37 AM	Bubbler valve closed
5/2/2011	10:55:37 AM	Bypass valve opened
5/2/2011	10:55:37 AM	Helium MFC set to  0.000000
5/2/2011	10:55:37 AM	H2 MFC set to  0.000000
5/2/2011	10:55:37 AM	BCl3 MFC set to  0.000000
5/2/2011	10:55:37 AM	PHl3 MFC set to  0.000000
5/2/2011	10:55:37 AM	SiCl4 MFC set to  0.000000
5/2/2011	10:55:37 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	10:55:38 AM	Tube furnace set to 0
5/2/2011	10:55:38 AM	Helium valve closed
5/2/2011	10:55:38 AM	H2 valve closed
5/2/2011	10:55:38 AM	BCl3 valve closed
5/2/2011	10:55:38 AM	PH3 valve closed
5/2/2011	10:55:38 AM	SiCl4 pre valve closed
5/2/2011	10:55:38 AM	SiCl4 post valve closed
5/2/2011	10:55:38 AM	Bubbler valve closed
5/2/2011	10:55:38 AM	Main Vac valve opened
5/2/2011	10:55:38 AM	Bypass valve opened
5/2/2011	10:55:38 AM	Helium MFC set to  0.000000
5/2/2011	10:55:38 AM	H2 MFC set to  0.000000
5/2/2011	10:55:38 AM	BCl3 MFC set to  0.000000
5/2/2011	10:55:38 AM	PHl3 MFC set to  0.000000
5/2/2011	10:55:38 AM	SiCl4 MFC set to  0.000000
5/2/2011	10:55:38 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	10:55:38 AM	Tube furnace set to 0
5/2/2011	10:55:38 AM	Run finished at 10:55 AM
5/2/2011	10:55:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	11:25:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/2/2011	11:25:22 AM	Recipe started at 11:25 AM
5/2/2011	11:25:22 AM	Helium valve closed
5/2/2011	11:25:22 AM	H2 valve closed
5/2/2011	11:25:22 AM	BCl3 valve closed
5/2/2011	11:25:22 AM	PH3 valve closed
5/2/2011	11:25:22 AM	SiCl4 pre valve closed
5/2/2011	11:25:22 AM	SiCl4 post valve closed
5/2/2011	11:25:22 AM	Main Vac valve closed
5/2/2011	11:25:22 AM	Bubbler valve closed
5/2/2011	11:25:22 AM	Bypass valve opened
5/2/2011	11:25:22 AM	Helium MFC set to  0.000000
5/2/2011	11:25:22 AM	H2 MFC set to  0.000000
5/2/2011	11:25:22 AM	BCl3 MFC set to  0.000000
5/2/2011	11:25:22 AM	PHl3 MFC set to  0.000000
5/2/2011	11:25:22 AM	SiCl4 MFC set to  0.000000
5/2/2011	11:25:22 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	11:25:23 AM	Tube furnace set to 0
5/2/2011	11:25:23 AM	Helium valve closed
5/2/2011	11:25:23 AM	H2 valve closed
5/2/2011	11:25:23 AM	BCl3 valve closed
5/2/2011	11:25:23 AM	PH3 valve closed
5/2/2011	11:25:23 AM	SiCl4 pre valve closed
5/2/2011	11:25:23 AM	SiCl4 post valve closed
5/2/2011	11:25:23 AM	Bubbler valve closed
5/2/2011	11:25:23 AM	Main Vac valve opened
5/2/2011	11:25:23 AM	Bypass valve opened
5/2/2011	11:25:23 AM	Helium MFC set to  0.000000
5/2/2011	11:25:23 AM	H2 MFC set to  0.000000
5/2/2011	11:25:23 AM	BCl3 MFC set to  0.000000
5/2/2011	11:25:23 AM	PHl3 MFC set to  0.000000
5/2/2011	11:25:23 AM	SiCl4 MFC set to  0.000000
5/2/2011	11:25:23 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	11:25:23 AM	Tube furnace set to 0
5/2/2011	11:26:23 AM	H2 valve closed
5/2/2011	11:26:23 AM	BCl3 valve closed
5/2/2011	11:26:23 AM	PH3 valve closed
5/2/2011	11:26:23 AM	SiCl4 pre valve closed
5/2/2011	11:26:23 AM	SiCl4 post valve closed
5/2/2011	11:26:23 AM	Bubbler valve closed
5/2/2011	11:26:23 AM	Helium valve opened
5/2/2011	11:26:23 AM	Main Vac valve opened
5/2/2011	11:26:23 AM	Bypass valve opened
5/2/2011	11:26:23 AM	Helium MFC set to  100.000000
5/2/2011	11:26:23 AM	H2 MFC set to  0.000000
5/2/2011	11:26:23 AM	BCl3 MFC set to  0.000000
5/2/2011	11:26:23 AM	PHl3 MFC set to  0.000000
5/2/2011	11:26:23 AM	SiCl4 MFC set to  0.000000
5/2/2011	11:26:23 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	11:26:23 AM	Tube furnace set to 0
5/2/2011	11:27:23 AM	Helium valve closed
5/2/2011	11:27:23 AM	H2 valve closed
5/2/2011	11:27:23 AM	BCl3 valve closed
5/2/2011	11:27:23 AM	PH3 valve closed
5/2/2011	11:27:23 AM	SiCl4 pre valve closed
5/2/2011	11:27:23 AM	SiCl4 post valve closed
5/2/2011	11:27:23 AM	Bubbler valve closed
5/2/2011	11:27:23 AM	Main Vac valve opened
5/2/2011	11:27:23 AM	Bypass valve opened
5/2/2011	11:27:23 AM	Helium MFC set to  0.000000
5/2/2011	11:27:23 AM	H2 MFC set to  0.000000
5/2/2011	11:27:23 AM	BCl3 MFC set to  0.000000
5/2/2011	11:27:23 AM	PHl3 MFC set to  0.000000
5/2/2011	11:27:23 AM	SiCl4 MFC set to  0.000000
5/2/2011	11:27:23 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	11:27:23 AM	Tube furnace set to 0
5/2/2011	11:28:23 AM	H2 valve closed
5/2/2011	11:28:23 AM	BCl3 valve closed
5/2/2011	11:28:23 AM	PH3 valve closed
5/2/2011	11:28:23 AM	SiCl4 pre valve closed
5/2/2011	11:28:23 AM	SiCl4 post valve closed
5/2/2011	11:28:23 AM	Bubbler valve closed
5/2/2011	11:28:23 AM	Helium valve opened
5/2/2011	11:28:23 AM	Main Vac valve opened
5/2/2011	11:28:23 AM	Bypass valve opened
5/2/2011	11:28:23 AM	Helium MFC set to  100.000000
5/2/2011	11:28:23 AM	H2 MFC set to  0.000000
5/2/2011	11:28:23 AM	BCl3 MFC set to  0.000000
5/2/2011	11:28:23 AM	PHl3 MFC set to  0.000000
5/2/2011	11:28:23 AM	SiCl4 MFC set to  0.000000
5/2/2011	11:28:23 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	11:28:24 AM	Tube furnace set to 0
5/2/2011	11:29:24 AM	Helium valve closed
5/2/2011	11:29:24 AM	H2 valve closed
5/2/2011	11:29:24 AM	BCl3 valve closed
5/2/2011	11:29:24 AM	PH3 valve closed
5/2/2011	11:29:24 AM	SiCl4 pre valve closed
5/2/2011	11:29:24 AM	SiCl4 post valve closed
5/2/2011	11:29:24 AM	Bubbler valve closed
5/2/2011	11:29:24 AM	Main Vac valve opened
5/2/2011	11:29:24 AM	Bypass valve opened
5/2/2011	11:29:24 AM	Helium MFC set to  0.000000
5/2/2011	11:29:24 AM	H2 MFC set to  0.000000
5/2/2011	11:29:24 AM	BCl3 MFC set to  0.000000
5/2/2011	11:29:24 AM	PHl3 MFC set to  0.000000
5/2/2011	11:29:24 AM	SiCl4 MFC set to  0.000000
5/2/2011	11:29:24 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	11:29:24 AM	Tube furnace set to 0
5/2/2011	11:30:24 AM	H2 valve closed
5/2/2011	11:30:24 AM	BCl3 valve closed
5/2/2011	11:30:24 AM	PH3 valve closed
5/2/2011	11:30:24 AM	SiCl4 pre valve closed
5/2/2011	11:30:24 AM	SiCl4 post valve closed
5/2/2011	11:30:24 AM	Bubbler valve closed
5/2/2011	11:30:24 AM	Helium valve opened
5/2/2011	11:30:24 AM	Main Vac valve opened
5/2/2011	11:30:24 AM	Bypass valve opened
5/2/2011	11:30:24 AM	Helium MFC set to  100.000000
5/2/2011	11:30:24 AM	H2 MFC set to  0.000000
5/2/2011	11:30:24 AM	BCl3 MFC set to  0.000000
5/2/2011	11:30:24 AM	PHl3 MFC set to  0.000000
5/2/2011	11:30:24 AM	SiCl4 MFC set to  0.000000
5/2/2011	11:30:24 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	11:30:24 AM	Tube furnace set to 0
5/2/2011	11:31:24 AM	Helium valve closed
5/2/2011	11:31:24 AM	H2 valve closed
5/2/2011	11:31:24 AM	BCl3 valve closed
5/2/2011	11:31:24 AM	PH3 valve closed
5/2/2011	11:31:24 AM	SiCl4 pre valve closed
5/2/2011	11:31:24 AM	SiCl4 post valve closed
5/2/2011	11:31:24 AM	Bubbler valve closed
5/2/2011	11:31:24 AM	Main Vac valve opened
5/2/2011	11:31:24 AM	Bypass valve opened
5/2/2011	11:31:24 AM	Helium MFC set to  0.000000
5/2/2011	11:31:24 AM	H2 MFC set to  0.000000
5/2/2011	11:31:24 AM	BCl3 MFC set to  0.000000
5/2/2011	11:31:24 AM	PHl3 MFC set to  0.000000
5/2/2011	11:31:24 AM	SiCl4 MFC set to  0.000000
5/2/2011	11:31:24 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	11:31:24 AM	Tube furnace set to 0
5/2/2011	11:32:24 AM	H2 valve closed
5/2/2011	11:32:24 AM	BCl3 valve closed
5/2/2011	11:32:24 AM	PH3 valve closed
5/2/2011	11:32:24 AM	SiCl4 pre valve closed
5/2/2011	11:32:24 AM	SiCl4 post valve closed
5/2/2011	11:32:24 AM	Bubbler valve closed
5/2/2011	11:32:24 AM	Helium valve opened
5/2/2011	11:32:24 AM	Main Vac valve opened
5/2/2011	11:32:24 AM	Bypass valve opened
5/2/2011	11:32:24 AM	Helium MFC set to  100.000000
5/2/2011	11:32:24 AM	H2 MFC set to  0.000000
5/2/2011	11:32:24 AM	BCl3 MFC set to  0.000000
5/2/2011	11:32:24 AM	PHl3 MFC set to  0.000000
5/2/2011	11:32:24 AM	SiCl4 MFC set to  0.000000
5/2/2011	11:32:24 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	11:32:24 AM	Tube furnace set to 0
5/2/2011	11:33:24 AM	Helium valve closed
5/2/2011	11:33:24 AM	H2 valve closed
5/2/2011	11:33:24 AM	BCl3 valve closed
5/2/2011	11:33:24 AM	PH3 valve closed
5/2/2011	11:33:24 AM	SiCl4 pre valve closed
5/2/2011	11:33:24 AM	SiCl4 post valve closed
5/2/2011	11:33:24 AM	Bubbler valve closed
5/2/2011	11:33:24 AM	Main Vac valve opened
5/2/2011	11:33:24 AM	Bypass valve opened
5/2/2011	11:33:24 AM	Helium MFC set to  0.000000
5/2/2011	11:33:24 AM	H2 MFC set to  0.000000
5/2/2011	11:33:24 AM	BCl3 MFC set to  0.000000
5/2/2011	11:33:24 AM	PHl3 MFC set to  0.000000
5/2/2011	11:33:24 AM	SiCl4 MFC set to  0.000000
5/2/2011	11:33:24 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	11:33:25 AM	Tube furnace set to 0
5/2/2011	11:34:25 AM	H2 valve closed
5/2/2011	11:34:25 AM	BCl3 valve closed
5/2/2011	11:34:25 AM	PH3 valve closed
5/2/2011	11:34:25 AM	SiCl4 pre valve closed
5/2/2011	11:34:25 AM	SiCl4 post valve closed
5/2/2011	11:34:25 AM	Bubbler valve closed
5/2/2011	11:34:25 AM	Helium valve opened
5/2/2011	11:34:25 AM	Main Vac valve opened
5/2/2011	11:34:25 AM	Bypass valve opened
5/2/2011	11:34:25 AM	Helium MFC set to  100.000000
5/2/2011	11:34:25 AM	H2 MFC set to  0.000000
5/2/2011	11:34:25 AM	BCl3 MFC set to  0.000000
5/2/2011	11:34:25 AM	PHl3 MFC set to  0.000000
5/2/2011	11:34:25 AM	SiCl4 MFC set to  0.000000
5/2/2011	11:34:25 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	11:34:25 AM	Tube furnace set to 0
5/2/2011	11:35:25 AM	Helium valve closed
5/2/2011	11:35:25 AM	H2 valve closed
5/2/2011	11:35:25 AM	BCl3 valve closed
5/2/2011	11:35:25 AM	PH3 valve closed
5/2/2011	11:35:25 AM	SiCl4 pre valve closed
5/2/2011	11:35:25 AM	SiCl4 post valve closed
5/2/2011	11:35:25 AM	Bubbler valve closed
5/2/2011	11:35:25 AM	Main Vac valve opened
5/2/2011	11:35:25 AM	Bypass valve opened
5/2/2011	11:35:25 AM	Helium MFC set to  0.000000
5/2/2011	11:35:25 AM	H2 MFC set to  0.000000
5/2/2011	11:35:25 AM	BCl3 MFC set to  0.000000
5/2/2011	11:35:25 AM	PHl3 MFC set to  0.000000
5/2/2011	11:35:25 AM	SiCl4 MFC set to  0.000000
5/2/2011	11:35:25 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	11:35:25 AM	Tube furnace set to 0
5/2/2011	11:36:25 AM	H2 valve closed
5/2/2011	11:36:25 AM	BCl3 valve closed
5/2/2011	11:36:25 AM	PH3 valve closed
5/2/2011	11:36:25 AM	SiCl4 pre valve closed
5/2/2011	11:36:25 AM	SiCl4 post valve closed
5/2/2011	11:36:25 AM	Bubbler valve closed
5/2/2011	11:36:25 AM	Helium valve opened
5/2/2011	11:36:25 AM	Main Vac valve opened
5/2/2011	11:36:25 AM	Bypass valve opened
5/2/2011	11:36:25 AM	Helium MFC set to  100.000000
5/2/2011	11:36:25 AM	H2 MFC set to  0.000000
5/2/2011	11:36:25 AM	BCl3 MFC set to  0.000000
5/2/2011	11:36:25 AM	PHl3 MFC set to  0.000000
5/2/2011	11:36:25 AM	SiCl4 MFC set to  0.000000
5/2/2011	11:36:25 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	11:36:25 AM	Tube furnace set to 0
5/2/2011	11:37:25 AM	Helium valve closed
5/2/2011	11:37:25 AM	H2 valve closed
5/2/2011	11:37:25 AM	BCl3 valve closed
5/2/2011	11:37:25 AM	PH3 valve closed
5/2/2011	11:37:25 AM	SiCl4 pre valve closed
5/2/2011	11:37:25 AM	SiCl4 post valve closed
5/2/2011	11:37:25 AM	Bubbler valve closed
5/2/2011	11:37:25 AM	Main Vac valve opened
5/2/2011	11:37:25 AM	Bypass valve opened
5/2/2011	11:37:25 AM	Helium MFC set to  0.000000
5/2/2011	11:37:25 AM	H2 MFC set to  0.000000
5/2/2011	11:37:25 AM	BCl3 MFC set to  0.000000
5/2/2011	11:37:25 AM	PHl3 MFC set to  0.000000
5/2/2011	11:37:25 AM	SiCl4 MFC set to  0.000000
5/2/2011	11:37:25 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	11:37:25 AM	Tube furnace set to 0
5/2/2011	11:38:25 AM	H2 valve closed
5/2/2011	11:38:25 AM	BCl3 valve closed
5/2/2011	11:38:25 AM	PH3 valve closed
5/2/2011	11:38:25 AM	SiCl4 pre valve closed
5/2/2011	11:38:25 AM	SiCl4 post valve closed
5/2/2011	11:38:25 AM	Bubbler valve closed
5/2/2011	11:38:25 AM	Helium valve opened
5/2/2011	11:38:25 AM	Main Vac valve opened
5/2/2011	11:38:25 AM	Bypass valve opened
5/2/2011	11:38:25 AM	Helium MFC set to  100.000000
5/2/2011	11:38:25 AM	H2 MFC set to  0.000000
5/2/2011	11:38:25 AM	BCl3 MFC set to  0.000000
5/2/2011	11:38:25 AM	PHl3 MFC set to  0.000000
5/2/2011	11:38:25 AM	SiCl4 MFC set to  0.000000
5/2/2011	11:38:25 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	11:38:26 AM	Tube furnace set to 0
5/2/2011	11:39:26 AM	Helium valve closed
5/2/2011	11:39:26 AM	H2 valve closed
5/2/2011	11:39:26 AM	BCl3 valve closed
5/2/2011	11:39:26 AM	PH3 valve closed
5/2/2011	11:39:26 AM	SiCl4 pre valve closed
5/2/2011	11:39:26 AM	SiCl4 post valve closed
5/2/2011	11:39:26 AM	Bubbler valve closed
5/2/2011	11:39:26 AM	Main Vac valve opened
5/2/2011	11:39:26 AM	Bypass valve opened
5/2/2011	11:39:26 AM	Helium MFC set to  0.000000
5/2/2011	11:39:26 AM	H2 MFC set to  0.000000
5/2/2011	11:39:26 AM	BCl3 MFC set to  0.000000
5/2/2011	11:39:26 AM	PHl3 MFC set to  0.000000
5/2/2011	11:39:26 AM	SiCl4 MFC set to  0.000000
5/2/2011	11:39:26 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	11:39:26 AM	Tube furnace set to 0
5/2/2011	11:40:26 AM	H2 valve closed
5/2/2011	11:40:26 AM	BCl3 valve closed
5/2/2011	11:40:26 AM	PH3 valve closed
5/2/2011	11:40:26 AM	SiCl4 pre valve closed
5/2/2011	11:40:26 AM	SiCl4 post valve closed
5/2/2011	11:40:26 AM	Bubbler valve closed
5/2/2011	11:40:26 AM	Helium valve opened
5/2/2011	11:40:26 AM	Main Vac valve opened
5/2/2011	11:40:26 AM	Bypass valve opened
5/2/2011	11:40:26 AM	Helium MFC set to  100.000000
5/2/2011	11:40:26 AM	H2 MFC set to  0.000000
5/2/2011	11:40:26 AM	BCl3 MFC set to  0.000000
5/2/2011	11:40:26 AM	PHl3 MFC set to  0.000000
5/2/2011	11:40:26 AM	SiCl4 MFC set to  0.000000
5/2/2011	11:40:26 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	11:40:26 AM	Tube furnace set to 0
5/2/2011	11:41:26 AM	Helium valve closed
5/2/2011	11:41:26 AM	H2 valve closed
5/2/2011	11:41:26 AM	BCl3 valve closed
5/2/2011	11:41:26 AM	PH3 valve closed
5/2/2011	11:41:26 AM	SiCl4 pre valve closed
5/2/2011	11:41:26 AM	SiCl4 post valve closed
5/2/2011	11:41:26 AM	Bubbler valve closed
5/2/2011	11:41:26 AM	Main Vac valve opened
5/2/2011	11:41:26 AM	Bypass valve opened
5/2/2011	11:41:26 AM	Helium MFC set to  0.000000
5/2/2011	11:41:26 AM	H2 MFC set to  0.000000
5/2/2011	11:41:26 AM	BCl3 MFC set to  0.000000
5/2/2011	11:41:26 AM	PHl3 MFC set to  0.000000
5/2/2011	11:41:26 AM	SiCl4 MFC set to  0.000000
5/2/2011	11:41:26 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	11:41:26 AM	Tube furnace set to 0
5/2/2011	11:42:26 AM	H2 valve closed
5/2/2011	11:42:26 AM	BCl3 valve closed
5/2/2011	11:42:26 AM	PH3 valve closed
5/2/2011	11:42:26 AM	SiCl4 pre valve closed
5/2/2011	11:42:26 AM	SiCl4 post valve closed
5/2/2011	11:42:26 AM	Bubbler valve closed
5/2/2011	11:42:26 AM	Helium valve opened
5/2/2011	11:42:26 AM	Main Vac valve opened
5/2/2011	11:42:26 AM	Bypass valve opened
5/2/2011	11:42:26 AM	Helium MFC set to  100.000000
5/2/2011	11:42:26 AM	H2 MFC set to  0.000000
5/2/2011	11:42:26 AM	BCl3 MFC set to  0.000000
5/2/2011	11:42:26 AM	PHl3 MFC set to  0.000000
5/2/2011	11:42:26 AM	SiCl4 MFC set to  0.000000
5/2/2011	11:42:26 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	11:42:26 AM	Tube furnace set to 0
5/2/2011	11:43:26 AM	Helium valve closed
5/2/2011	11:43:26 AM	H2 valve closed
5/2/2011	11:43:26 AM	BCl3 valve closed
5/2/2011	11:43:26 AM	PH3 valve closed
5/2/2011	11:43:26 AM	SiCl4 pre valve closed
5/2/2011	11:43:26 AM	SiCl4 post valve closed
5/2/2011	11:43:26 AM	Bubbler valve closed
5/2/2011	11:43:26 AM	Main Vac valve opened
5/2/2011	11:43:26 AM	Bypass valve opened
5/2/2011	11:43:26 AM	Helium MFC set to  0.000000
5/2/2011	11:43:26 AM	H2 MFC set to  0.000000
5/2/2011	11:43:26 AM	BCl3 MFC set to  0.000000
5/2/2011	11:43:26 AM	PHl3 MFC set to  0.000000
5/2/2011	11:43:26 AM	SiCl4 MFC set to  0.000000
5/2/2011	11:43:26 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	11:43:27 AM	Tube furnace set to 0
5/2/2011	11:44:27 AM	H2 valve closed
5/2/2011	11:44:27 AM	BCl3 valve closed
5/2/2011	11:44:27 AM	PH3 valve closed
5/2/2011	11:44:27 AM	SiCl4 pre valve closed
5/2/2011	11:44:27 AM	SiCl4 post valve closed
5/2/2011	11:44:27 AM	Bubbler valve closed
5/2/2011	11:44:27 AM	Helium valve opened
5/2/2011	11:44:27 AM	Main Vac valve opened
5/2/2011	11:44:27 AM	Bypass valve opened
5/2/2011	11:44:27 AM	Helium MFC set to  100.000000
5/2/2011	11:44:27 AM	H2 MFC set to  0.000000
5/2/2011	11:44:27 AM	BCl3 MFC set to  0.000000
5/2/2011	11:44:27 AM	PHl3 MFC set to  0.000000
5/2/2011	11:44:27 AM	SiCl4 MFC set to  0.000000
5/2/2011	11:44:27 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	11:44:27 AM	Tube furnace set to 0
5/2/2011	11:45:27 AM	Helium valve closed
5/2/2011	11:45:27 AM	H2 valve closed
5/2/2011	11:45:27 AM	BCl3 valve closed
5/2/2011	11:45:27 AM	PH3 valve closed
5/2/2011	11:45:27 AM	SiCl4 pre valve closed
5/2/2011	11:45:27 AM	SiCl4 post valve closed
5/2/2011	11:45:27 AM	Bubbler valve closed
5/2/2011	11:45:27 AM	Main Vac valve opened
5/2/2011	11:45:27 AM	Bypass valve opened
5/2/2011	11:45:27 AM	Helium MFC set to  0.000000
5/2/2011	11:45:27 AM	H2 MFC set to  0.000000
5/2/2011	11:45:27 AM	BCl3 MFC set to  0.000000
5/2/2011	11:45:27 AM	PHl3 MFC set to  0.000000
5/2/2011	11:45:27 AM	SiCl4 MFC set to  0.000000
5/2/2011	11:45:27 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	11:45:27 AM	Tube furnace set to 0
5/2/2011	11:45:28 AM	Run finished at 11:45 AM
5/2/2011	11:45:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/2/2011	11:46:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/2/2011	11:46:27 AM	Recipe started at 11:46 AM
5/2/2011	11:46:27 AM	Helium valve closed
5/2/2011	11:46:27 AM	H2 valve closed
5/2/2011	11:46:27 AM	BCl3 valve closed
5/2/2011	11:46:27 AM	PH3 valve closed
5/2/2011	11:46:27 AM	SiCl4 pre valve closed
5/2/2011	11:46:27 AM	SiCl4 post valve closed
5/2/2011	11:46:27 AM	Main Vac valve closed
5/2/2011	11:46:27 AM	Bypass valve closed
5/2/2011	11:46:27 AM	Bubbler valve closed
5/2/2011	11:46:27 AM	Helium MFC set to  0.000000
5/2/2011	11:46:27 AM	H2 MFC set to  0.000000
5/2/2011	11:46:27 AM	BCl3 MFC set to  0.000000
5/2/2011	11:46:27 AM	PHl3 MFC set to  0.000000
5/2/2011	11:46:27 AM	SiCl4 MFC set to  0.000000
5/2/2011	11:46:27 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	11:46:27 AM	Tube furnace set to 0
5/2/2011	11:46:27 AM	Run finished at 11:46 AM
5/2/2011	11:46:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/2/2011	11:46:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	11:46:38 AM	Recipe started at 11:46 AM
5/2/2011	11:46:38 AM	Helium valve closed
5/2/2011	11:46:38 AM	H2 valve closed
5/2/2011	11:46:38 AM	BCl3 valve closed
5/2/2011	11:46:38 AM	PH3 valve closed
5/2/2011	11:46:38 AM	SiCl4 pre valve closed
5/2/2011	11:46:38 AM	SiCl4 post valve closed
5/2/2011	11:46:38 AM	Main Vac valve closed
5/2/2011	11:46:38 AM	Bubbler valve closed
5/2/2011	11:46:38 AM	Bypass valve opened
5/2/2011	11:46:38 AM	Helium MFC set to  0.000000
5/2/2011	11:46:38 AM	H2 MFC set to  0.000000
5/2/2011	11:46:38 AM	BCl3 MFC set to  0.000000
5/2/2011	11:46:38 AM	PHl3 MFC set to  0.000000
5/2/2011	11:46:38 AM	SiCl4 MFC set to  0.000000
5/2/2011	11:46:38 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	11:46:38 AM	Tube furnace set to 0
5/2/2011	11:46:38 AM	Helium valve closed
5/2/2011	11:46:38 AM	H2 valve closed
5/2/2011	11:46:38 AM	BCl3 valve closed
5/2/2011	11:46:38 AM	PH3 valve closed
5/2/2011	11:46:38 AM	SiCl4 pre valve closed
5/2/2011	11:46:38 AM	SiCl4 post valve closed
5/2/2011	11:46:38 AM	Bubbler valve closed
5/2/2011	11:46:38 AM	Main Vac valve opened
5/2/2011	11:46:38 AM	Bypass valve opened
5/2/2011	11:46:38 AM	Helium MFC set to  0.000000
5/2/2011	11:46:38 AM	H2 MFC set to  0.000000
5/2/2011	11:46:38 AM	BCl3 MFC set to  0.000000
5/2/2011	11:46:38 AM	PHl3 MFC set to  0.000000
5/2/2011	11:46:38 AM	SiCl4 MFC set to  0.000000
5/2/2011	11:46:38 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	11:46:39 AM	Tube furnace set to 0
5/2/2011	11:46:39 AM	Run finished at 11:46 AM
5/2/2011	11:46:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	11:47:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/2/2011	11:47:06 AM	Recipe started at 11:47 AM
5/2/2011	11:47:06 AM	Helium valve closed
5/2/2011	11:47:06 AM	H2 valve closed
5/2/2011	11:47:06 AM	BCl3 valve closed
5/2/2011	11:47:06 AM	PH3 valve closed
5/2/2011	11:47:06 AM	SiCl4 pre valve closed
5/2/2011	11:47:06 AM	SiCl4 post valve closed
5/2/2011	11:47:06 AM	Main Vac valve closed
5/2/2011	11:47:06 AM	Bypass valve closed
5/2/2011	11:47:06 AM	Bubbler valve closed
5/2/2011	11:47:06 AM	Helium MFC set to  0.000000
5/2/2011	11:47:06 AM	H2 MFC set to  0.000000
5/2/2011	11:47:06 AM	BCl3 MFC set to  0.000000
5/2/2011	11:47:06 AM	PHl3 MFC set to  0.000000
5/2/2011	11:47:06 AM	SiCl4 MFC set to  0.000000
5/2/2011	11:47:06 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	11:47:06 AM	Tube furnace set to 0
5/2/2011	11:47:07 AM	Run finished at 11:47 AM
5/2/2011	11:47:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/2/2011	11:47:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	11:47:21 AM	Recipe started at 11:47 AM
5/2/2011	11:47:21 AM	Helium valve closed
5/2/2011	11:47:21 AM	H2 valve closed
5/2/2011	11:47:21 AM	BCl3 valve closed
5/2/2011	11:47:21 AM	PH3 valve closed
5/2/2011	11:47:21 AM	SiCl4 pre valve closed
5/2/2011	11:47:21 AM	SiCl4 post valve closed
5/2/2011	11:47:21 AM	Main Vac valve closed
5/2/2011	11:47:21 AM	Bubbler valve closed
5/2/2011	11:47:21 AM	Bypass valve opened
5/2/2011	11:47:21 AM	Helium MFC set to  0.000000
5/2/2011	11:47:21 AM	H2 MFC set to  0.000000
5/2/2011	11:47:21 AM	BCl3 MFC set to  0.000000
5/2/2011	11:47:21 AM	PHl3 MFC set to  0.000000
5/2/2011	11:47:21 AM	SiCl4 MFC set to  0.000000
5/2/2011	11:47:21 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	11:47:21 AM	Tube furnace set to 0
5/2/2011	11:47:22 AM	Helium valve closed
5/2/2011	11:47:22 AM	H2 valve closed
5/2/2011	11:47:22 AM	BCl3 valve closed
5/2/2011	11:47:22 AM	PH3 valve closed
5/2/2011	11:47:22 AM	SiCl4 pre valve closed
5/2/2011	11:47:22 AM	SiCl4 post valve closed
5/2/2011	11:47:22 AM	Bubbler valve closed
5/2/2011	11:47:22 AM	Main Vac valve opened
5/2/2011	11:47:22 AM	Bypass valve opened
5/2/2011	11:47:22 AM	Helium MFC set to  0.000000
5/2/2011	11:47:22 AM	H2 MFC set to  0.000000
5/2/2011	11:47:22 AM	BCl3 MFC set to  0.000000
5/2/2011	11:47:22 AM	PHl3 MFC set to  0.000000
5/2/2011	11:47:22 AM	SiCl4 MFC set to  0.000000
5/2/2011	11:47:22 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	11:47:22 AM	Tube furnace set to 0
5/2/2011	11:47:22 AM	Run finished at 11:47 AM
5/2/2011	11:47:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	11:48:39 AM	Recipe started at 11:48 AM
5/2/2011	11:48:39 AM	Helium valve closed
5/2/2011	11:48:39 AM	BCl3 valve closed
5/2/2011	11:48:39 AM	PH3 valve closed
5/2/2011	11:48:39 AM	SiCl4 pre valve closed
5/2/2011	11:48:39 AM	SiCl4 post valve closed
5/2/2011	11:48:39 AM	Main Vac valve closed
5/2/2011	11:48:39 AM	Bypass valve closed
5/2/2011	11:48:39 AM	Bubbler valve closed
5/2/2011	11:48:39 AM	H2 valve opened
5/2/2011	11:48:39 AM	Helium MFC set to  0.000000
5/2/2011	11:48:39 AM	H2 MFC set to  500.000000
5/2/2011	11:48:39 AM	BCl3 MFC set to  0.000000
5/2/2011	11:48:39 AM	PHl3 MFC set to  0.000000
5/2/2011	11:48:39 AM	SiCl4 MFC set to  0.000000
5/2/2011	11:48:39 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	11:48:39 AM	Tube furnace set to 0
5/2/2011	11:50:02 AM	Helium valve closed
5/2/2011	11:50:02 AM	BCl3 valve closed
5/2/2011	11:50:02 AM	PH3 valve closed
5/2/2011	11:50:02 AM	SiCl4 pre valve closed
5/2/2011	11:50:02 AM	SiCl4 post valve closed
5/2/2011	11:50:02 AM	Main Vac valve closed
5/2/2011	11:50:02 AM	Bypass valve closed
5/2/2011	11:50:02 AM	H2 valve opened
5/2/2011	11:50:02 AM	Bubbler valve opened
5/2/2011	11:50:02 AM	Helium MFC set to  0.000000
5/2/2011	11:50:02 AM	H2 MFC set to  500.000000
5/2/2011	11:50:02 AM	BCl3 MFC set to  0.000000
5/2/2011	11:50:02 AM	PHl3 MFC set to  0.000000
5/2/2011	11:50:02 AM	SiCl4 MFC set to  0.000000
5/2/2011	11:50:02 AM	Bypass solenoid MFC set to  0.000000
5/2/2011	11:50:02 AM	Tube furnace set to 1000
5/2/2011	12:10:02 PM	Helium valve closed
5/2/2011	12:10:02 PM	PH3 valve closed
5/2/2011	12:10:02 PM	Main Vac valve closed
5/2/2011	12:10:02 PM	Bypass valve closed
5/2/2011	12:10:02 PM	H2 valve opened
5/2/2011	12:10:02 PM	BCl3 valve opened
5/2/2011	12:10:02 PM	SiCl4 pre valve opened
5/2/2011	12:10:02 PM	SiCl4 post valve opened
5/2/2011	12:10:02 PM	Bubbler valve opened
5/2/2011	12:10:02 PM	Helium MFC set to  0.000000
5/2/2011	12:10:02 PM	H2 MFC set to  500.000000
5/2/2011	12:10:02 PM	BCl3 MFC set to  5.000000
5/2/2011	12:10:02 PM	PHl3 MFC set to  0.000000
5/2/2011	12:10:02 PM	SiCl4 MFC set to  50.000000
5/2/2011	12:10:02 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	12:10:03 PM	Tube furnace set to 1000
5/2/2011	12:26:03 PM	H2 valve closed
5/2/2011	12:26:03 PM	BCl3 valve closed
5/2/2011	12:26:03 PM	PH3 valve closed
5/2/2011	12:26:03 PM	SiCl4 pre valve closed
5/2/2011	12:26:03 PM	SiCl4 post valve closed
5/2/2011	12:26:03 PM	Main Vac valve closed
5/2/2011	12:26:03 PM	Bypass valve closed
5/2/2011	12:26:03 PM	Helium valve opened
5/2/2011	12:26:03 PM	Bubbler valve opened
5/2/2011	12:26:03 PM	Helium MFC set to  500.000000
5/2/2011	12:26:03 PM	H2 MFC set to  0.000000
5/2/2011	12:26:03 PM	BCl3 MFC set to  0.000000
5/2/2011	12:26:03 PM	PHl3 MFC set to  0.000000
5/2/2011	12:26:03 PM	SiCl4 MFC set to  0.000000
5/2/2011	12:26:03 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	12:26:03 PM	Tube furnace set to 0
5/2/2011	12:46:03 PM	Helium valve closed
5/2/2011	12:46:03 PM	H2 valve closed
5/2/2011	12:46:03 PM	BCl3 valve closed
5/2/2011	12:46:03 PM	PH3 valve closed
5/2/2011	12:46:03 PM	SiCl4 pre valve closed
5/2/2011	12:46:03 PM	SiCl4 post valve closed
5/2/2011	12:46:03 PM	Main Vac valve closed
5/2/2011	12:46:03 PM	Bypass valve closed
5/2/2011	12:46:03 PM	Bubbler valve closed
5/2/2011	12:46:03 PM	Helium MFC set to  0.000000
5/2/2011	12:46:03 PM	H2 MFC set to  0.000000
5/2/2011	12:46:03 PM	BCl3 MFC set to  0.000000
5/2/2011	12:46:03 PM	PHl3 MFC set to  0.000000
5/2/2011	12:46:03 PM	SiCl4 MFC set to  0.000000
5/2/2011	12:46:03 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	12:46:03 PM	Tube furnace set to 0
5/2/2011	12:46:03 PM	Run finished at 12:46 PM
5/2/2011	2:05:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/2/2011	2:05:39 PM	Recipe started at 2:05 PM
5/2/2011	2:05:39 PM	H2 valve closed
5/2/2011	2:05:39 PM	BCl3 valve closed
5/2/2011	2:05:39 PM	PH3 valve closed
5/2/2011	2:05:39 PM	SiCl4 pre valve closed
5/2/2011	2:05:39 PM	SiCl4 post valve closed
5/2/2011	2:05:39 PM	Main Vac valve closed
5/2/2011	2:05:39 PM	Bypass valve closed
5/2/2011	2:05:39 PM	Bubbler valve closed
5/2/2011	2:05:39 PM	Helium valve opened
5/2/2011	2:05:39 PM	Helium MFC set to  500.000000
5/2/2011	2:05:39 PM	H2 MFC set to  0.000000
5/2/2011	2:05:39 PM	BCl3 MFC set to  0.000000
5/2/2011	2:05:39 PM	PHl3 MFC set to  0.000000
5/2/2011	2:05:39 PM	SiCl4 MFC set to  0.000000
5/2/2011	2:05:39 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	2:05:39 PM	Tube furnace set to 0
5/2/2011	2:05:45 PM	Helium valve closed
5/2/2011	2:05:45 PM	H2 valve closed
5/2/2011	2:05:45 PM	BCl3 valve closed
5/2/2011	2:05:45 PM	PH3 valve closed
5/2/2011	2:05:45 PM	SiCl4 pre valve closed
5/2/2011	2:05:45 PM	SiCl4 post valve closed
5/2/2011	2:05:45 PM	Main Vac valve closed
5/2/2011	2:05:45 PM	Bypass valve closed
5/2/2011	2:05:45 PM	Bubbler valve closed
5/2/2011	2:05:45 PM	Helium MFC set to  0.000000
5/2/2011	2:05:45 PM	H2 MFC set to  0.000000
5/2/2011	2:05:45 PM	BCl3 MFC set to  0.000000
5/2/2011	2:05:45 PM	PHl3 MFC set to  0.000000
5/2/2011	2:05:45 PM	SiCl4 MFC set to  0.000000
5/2/2011	2:05:45 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	2:05:46 PM	Tube furnace set to 0
5/2/2011	2:05:46 PM	Run finished at 2:05 PM
5/2/2011	2:05:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/2/2011	2:16:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	2:16:37 PM	Recipe started at 2:16 PM
5/2/2011	2:16:37 PM	Helium valve closed
5/2/2011	2:16:37 PM	H2 valve closed
5/2/2011	2:16:37 PM	BCl3 valve closed
5/2/2011	2:16:37 PM	PH3 valve closed
5/2/2011	2:16:37 PM	SiCl4 pre valve closed
5/2/2011	2:16:37 PM	SiCl4 post valve closed
5/2/2011	2:16:37 PM	Main Vac valve closed
5/2/2011	2:16:37 PM	Bubbler valve closed
5/2/2011	2:16:37 PM	Bypass valve opened
5/2/2011	2:16:37 PM	Helium MFC set to  0.000000
5/2/2011	2:16:37 PM	H2 MFC set to  0.000000
5/2/2011	2:16:37 PM	BCl3 MFC set to  0.000000
5/2/2011	2:16:37 PM	PHl3 MFC set to  0.000000
5/2/2011	2:16:37 PM	SiCl4 MFC set to  0.000000
5/2/2011	2:16:37 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	2:16:37 PM	Tube furnace set to 0
5/2/2011	2:17:09 PM	Helium valve closed
5/2/2011	2:17:09 PM	H2 valve closed
5/2/2011	2:17:09 PM	BCl3 valve closed
5/2/2011	2:17:09 PM	PH3 valve closed
5/2/2011	2:17:09 PM	SiCl4 pre valve closed
5/2/2011	2:17:09 PM	SiCl4 post valve closed
5/2/2011	2:17:09 PM	Bubbler valve closed
5/2/2011	2:17:09 PM	Main Vac valve opened
5/2/2011	2:17:09 PM	Bypass valve opened
5/2/2011	2:17:09 PM	Helium MFC set to  0.000000
5/2/2011	2:17:09 PM	H2 MFC set to  0.000000
5/2/2011	2:17:09 PM	BCl3 MFC set to  0.000000
5/2/2011	2:17:09 PM	PHl3 MFC set to  0.000000
5/2/2011	2:17:09 PM	SiCl4 MFC set to  0.000000
5/2/2011	2:17:09 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	2:17:10 PM	Tube furnace set to 0
5/2/2011	2:17:10 PM	Run finished at 2:17 PM
5/2/2011	2:17:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	2:44:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/2/2011	2:45:02 PM	Recipe started at 2:44 PM
5/2/2011	2:45:02 PM	Helium valve closed
5/2/2011	2:45:02 PM	H2 valve closed
5/2/2011	2:45:02 PM	BCl3 valve closed
5/2/2011	2:45:02 PM	PH3 valve closed
5/2/2011	2:45:02 PM	SiCl4 pre valve closed
5/2/2011	2:45:02 PM	SiCl4 post valve closed
5/2/2011	2:45:02 PM	Main Vac valve closed
5/2/2011	2:45:02 PM	Bubbler valve closed
5/2/2011	2:45:02 PM	Bypass valve opened
5/2/2011	2:45:02 PM	Helium MFC set to  0.000000
5/2/2011	2:45:02 PM	H2 MFC set to  0.000000
5/2/2011	2:45:02 PM	BCl3 MFC set to  0.000000
5/2/2011	2:45:02 PM	PHl3 MFC set to  0.000000
5/2/2011	2:45:02 PM	SiCl4 MFC set to  0.000000
5/2/2011	2:45:02 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	2:45:03 PM	Tube furnace set to 0
5/2/2011	2:45:03 PM	Helium valve closed
5/2/2011	2:45:03 PM	H2 valve closed
5/2/2011	2:45:03 PM	BCl3 valve closed
5/2/2011	2:45:03 PM	PH3 valve closed
5/2/2011	2:45:03 PM	SiCl4 pre valve closed
5/2/2011	2:45:03 PM	SiCl4 post valve closed
5/2/2011	2:45:03 PM	Bubbler valve closed
5/2/2011	2:45:03 PM	Main Vac valve opened
5/2/2011	2:45:03 PM	Bypass valve opened
5/2/2011	2:45:03 PM	Helium MFC set to  0.000000
5/2/2011	2:45:03 PM	H2 MFC set to  0.000000
5/2/2011	2:45:03 PM	BCl3 MFC set to  0.000000
5/2/2011	2:45:03 PM	PHl3 MFC set to  0.000000
5/2/2011	2:45:03 PM	SiCl4 MFC set to  0.000000
5/2/2011	2:45:03 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	2:45:03 PM	Tube furnace set to 0
5/2/2011	2:46:03 PM	H2 valve closed
5/2/2011	2:46:03 PM	BCl3 valve closed
5/2/2011	2:46:03 PM	PH3 valve closed
5/2/2011	2:46:03 PM	SiCl4 pre valve closed
5/2/2011	2:46:03 PM	SiCl4 post valve closed
5/2/2011	2:46:03 PM	Bubbler valve closed
5/2/2011	2:46:03 PM	Helium valve opened
5/2/2011	2:46:03 PM	Main Vac valve opened
5/2/2011	2:46:03 PM	Bypass valve opened
5/2/2011	2:46:03 PM	Helium MFC set to  100.000000
5/2/2011	2:46:03 PM	H2 MFC set to  0.000000
5/2/2011	2:46:03 PM	BCl3 MFC set to  0.000000
5/2/2011	2:46:03 PM	PHl3 MFC set to  0.000000
5/2/2011	2:46:03 PM	SiCl4 MFC set to  0.000000
5/2/2011	2:46:03 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	2:46:03 PM	Tube furnace set to 0
5/2/2011	2:47:03 PM	Helium valve closed
5/2/2011	2:47:03 PM	H2 valve closed
5/2/2011	2:47:03 PM	BCl3 valve closed
5/2/2011	2:47:03 PM	PH3 valve closed
5/2/2011	2:47:03 PM	SiCl4 pre valve closed
5/2/2011	2:47:03 PM	SiCl4 post valve closed
5/2/2011	2:47:03 PM	Bubbler valve closed
5/2/2011	2:47:03 PM	Main Vac valve opened
5/2/2011	2:47:03 PM	Bypass valve opened
5/2/2011	2:47:03 PM	Helium MFC set to  0.000000
5/2/2011	2:47:03 PM	H2 MFC set to  0.000000
5/2/2011	2:47:03 PM	BCl3 MFC set to  0.000000
5/2/2011	2:47:03 PM	PHl3 MFC set to  0.000000
5/2/2011	2:47:03 PM	SiCl4 MFC set to  0.000000
5/2/2011	2:47:03 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	2:47:03 PM	Tube furnace set to 0
5/2/2011	2:48:03 PM	H2 valve closed
5/2/2011	2:48:03 PM	BCl3 valve closed
5/2/2011	2:48:03 PM	PH3 valve closed
5/2/2011	2:48:03 PM	SiCl4 pre valve closed
5/2/2011	2:48:03 PM	SiCl4 post valve closed
5/2/2011	2:48:03 PM	Bubbler valve closed
5/2/2011	2:48:03 PM	Helium valve opened
5/2/2011	2:48:03 PM	Main Vac valve opened
5/2/2011	2:48:03 PM	Bypass valve opened
5/2/2011	2:48:03 PM	Helium MFC set to  100.000000
5/2/2011	2:48:03 PM	H2 MFC set to  0.000000
5/2/2011	2:48:04 PM	BCl3 MFC set to  0.000000
5/2/2011	2:48:04 PM	PHl3 MFC set to  0.000000
5/2/2011	2:48:04 PM	SiCl4 MFC set to  0.000000
5/2/2011	2:48:04 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	2:48:04 PM	Tube furnace set to 0
5/2/2011	2:49:04 PM	Helium valve closed
5/2/2011	2:49:04 PM	H2 valve closed
5/2/2011	2:49:04 PM	BCl3 valve closed
5/2/2011	2:49:04 PM	PH3 valve closed
5/2/2011	2:49:04 PM	SiCl4 pre valve closed
5/2/2011	2:49:04 PM	SiCl4 post valve closed
5/2/2011	2:49:04 PM	Bubbler valve closed
5/2/2011	2:49:04 PM	Main Vac valve opened
5/2/2011	2:49:04 PM	Bypass valve opened
5/2/2011	2:49:04 PM	Helium MFC set to  0.000000
5/2/2011	2:49:04 PM	H2 MFC set to  0.000000
5/2/2011	2:49:04 PM	BCl3 MFC set to  0.000000
5/2/2011	2:49:04 PM	PHl3 MFC set to  0.000000
5/2/2011	2:49:04 PM	SiCl4 MFC set to  0.000000
5/2/2011	2:49:04 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	2:49:04 PM	Tube furnace set to 0
5/2/2011	2:50:04 PM	H2 valve closed
5/2/2011	2:50:04 PM	BCl3 valve closed
5/2/2011	2:50:04 PM	PH3 valve closed
5/2/2011	2:50:04 PM	SiCl4 pre valve closed
5/2/2011	2:50:04 PM	SiCl4 post valve closed
5/2/2011	2:50:04 PM	Bubbler valve closed
5/2/2011	2:50:04 PM	Helium valve opened
5/2/2011	2:50:04 PM	Main Vac valve opened
5/2/2011	2:50:04 PM	Bypass valve opened
5/2/2011	2:50:04 PM	Helium MFC set to  100.000000
5/2/2011	2:50:04 PM	H2 MFC set to  0.000000
5/2/2011	2:50:04 PM	BCl3 MFC set to  0.000000
5/2/2011	2:50:04 PM	PHl3 MFC set to  0.000000
5/2/2011	2:50:04 PM	SiCl4 MFC set to  0.000000
5/2/2011	2:50:04 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	2:50:04 PM	Tube furnace set to 0
5/2/2011	2:51:04 PM	Helium valve closed
5/2/2011	2:51:04 PM	H2 valve closed
5/2/2011	2:51:04 PM	BCl3 valve closed
5/2/2011	2:51:04 PM	PH3 valve closed
5/2/2011	2:51:04 PM	SiCl4 pre valve closed
5/2/2011	2:51:04 PM	SiCl4 post valve closed
5/2/2011	2:51:04 PM	Bubbler valve closed
5/2/2011	2:51:04 PM	Main Vac valve opened
5/2/2011	2:51:04 PM	Bypass valve opened
5/2/2011	2:51:04 PM	Helium MFC set to  0.000000
5/2/2011	2:51:04 PM	H2 MFC set to  0.000000
5/2/2011	2:51:04 PM	BCl3 MFC set to  0.000000
5/2/2011	2:51:04 PM	PHl3 MFC set to  0.000000
5/2/2011	2:51:04 PM	SiCl4 MFC set to  0.000000
5/2/2011	2:51:04 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	2:51:04 PM	Tube furnace set to 0
5/2/2011	2:52:04 PM	H2 valve closed
5/2/2011	2:52:04 PM	BCl3 valve closed
5/2/2011	2:52:04 PM	PH3 valve closed
5/2/2011	2:52:04 PM	SiCl4 pre valve closed
5/2/2011	2:52:04 PM	SiCl4 post valve closed
5/2/2011	2:52:04 PM	Bubbler valve closed
5/2/2011	2:52:04 PM	Helium valve opened
5/2/2011	2:52:04 PM	Main Vac valve opened
5/2/2011	2:52:04 PM	Bypass valve opened
5/2/2011	2:52:04 PM	Helium MFC set to  100.000000
5/2/2011	2:52:04 PM	H2 MFC set to  0.000000
5/2/2011	2:52:04 PM	BCl3 MFC set to  0.000000
5/2/2011	2:52:04 PM	PHl3 MFC set to  0.000000
5/2/2011	2:52:04 PM	SiCl4 MFC set to  0.000000
5/2/2011	2:52:04 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	2:52:04 PM	Tube furnace set to 0
5/2/2011	2:53:04 PM	Helium valve closed
5/2/2011	2:53:04 PM	H2 valve closed
5/2/2011	2:53:04 PM	BCl3 valve closed
5/2/2011	2:53:04 PM	PH3 valve closed
5/2/2011	2:53:04 PM	SiCl4 pre valve closed
5/2/2011	2:53:04 PM	SiCl4 post valve closed
5/2/2011	2:53:04 PM	Bubbler valve closed
5/2/2011	2:53:04 PM	Main Vac valve opened
5/2/2011	2:53:05 PM	Bypass valve opened
5/2/2011	2:53:05 PM	Helium MFC set to  0.000000
5/2/2011	2:53:05 PM	H2 MFC set to  0.000000
5/2/2011	2:53:05 PM	BCl3 MFC set to  0.000000
5/2/2011	2:53:05 PM	PHl3 MFC set to  0.000000
5/2/2011	2:53:05 PM	SiCl4 MFC set to  0.000000
5/2/2011	2:53:05 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	2:53:05 PM	Tube furnace set to 0
5/2/2011	2:54:05 PM	H2 valve closed
5/2/2011	2:54:05 PM	BCl3 valve closed
5/2/2011	2:54:05 PM	PH3 valve closed
5/2/2011	2:54:05 PM	SiCl4 pre valve closed
5/2/2011	2:54:05 PM	SiCl4 post valve closed
5/2/2011	2:54:05 PM	Bubbler valve closed
5/2/2011	2:54:05 PM	Helium valve opened
5/2/2011	2:54:05 PM	Main Vac valve opened
5/2/2011	2:54:05 PM	Bypass valve opened
5/2/2011	2:54:05 PM	Helium MFC set to  100.000000
5/2/2011	2:54:05 PM	H2 MFC set to  0.000000
5/2/2011	2:54:05 PM	BCl3 MFC set to  0.000000
5/2/2011	2:54:05 PM	PHl3 MFC set to  0.000000
5/2/2011	2:54:05 PM	SiCl4 MFC set to  0.000000
5/2/2011	2:54:05 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	2:54:05 PM	Tube furnace set to 0
5/2/2011	2:55:05 PM	Helium valve closed
5/2/2011	2:55:05 PM	H2 valve closed
5/2/2011	2:55:05 PM	BCl3 valve closed
5/2/2011	2:55:05 PM	PH3 valve closed
5/2/2011	2:55:05 PM	SiCl4 pre valve closed
5/2/2011	2:55:05 PM	SiCl4 post valve closed
5/2/2011	2:55:05 PM	Bubbler valve closed
5/2/2011	2:55:05 PM	Main Vac valve opened
5/2/2011	2:55:05 PM	Bypass valve opened
5/2/2011	2:55:05 PM	Helium MFC set to  0.000000
5/2/2011	2:55:05 PM	H2 MFC set to  0.000000
5/2/2011	2:55:05 PM	BCl3 MFC set to  0.000000
5/2/2011	2:55:05 PM	PHl3 MFC set to  0.000000
5/2/2011	2:55:05 PM	SiCl4 MFC set to  0.000000
5/2/2011	2:55:05 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	2:55:05 PM	Tube furnace set to 0
5/2/2011	2:56:05 PM	H2 valve closed
5/2/2011	2:56:05 PM	BCl3 valve closed
5/2/2011	2:56:05 PM	PH3 valve closed
5/2/2011	2:56:05 PM	SiCl4 pre valve closed
5/2/2011	2:56:05 PM	SiCl4 post valve closed
5/2/2011	2:56:05 PM	Bubbler valve closed
5/2/2011	2:56:05 PM	Helium valve opened
5/2/2011	2:56:05 PM	Main Vac valve opened
5/2/2011	2:56:05 PM	Bypass valve opened
5/2/2011	2:56:05 PM	Helium MFC set to  100.000000
5/2/2011	2:56:05 PM	H2 MFC set to  0.000000
5/2/2011	2:56:05 PM	BCl3 MFC set to  0.000000
5/2/2011	2:56:05 PM	PHl3 MFC set to  0.000000
5/2/2011	2:56:05 PM	SiCl4 MFC set to  0.000000
5/2/2011	2:56:05 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	2:56:05 PM	Tube furnace set to 0
5/2/2011	2:57:05 PM	Helium valve closed
5/2/2011	2:57:05 PM	H2 valve closed
5/2/2011	2:57:05 PM	BCl3 valve closed
5/2/2011	2:57:05 PM	PH3 valve closed
5/2/2011	2:57:05 PM	SiCl4 pre valve closed
5/2/2011	2:57:05 PM	SiCl4 post valve closed
5/2/2011	2:57:05 PM	Bubbler valve closed
5/2/2011	2:57:05 PM	Main Vac valve opened
5/2/2011	2:57:05 PM	Bypass valve opened
5/2/2011	2:57:05 PM	Helium MFC set to  0.000000
5/2/2011	2:57:05 PM	H2 MFC set to  0.000000
5/2/2011	2:57:05 PM	BCl3 MFC set to  0.000000
5/2/2011	2:57:05 PM	PHl3 MFC set to  0.000000
5/2/2011	2:57:05 PM	SiCl4 MFC set to  0.000000
5/2/2011	2:57:05 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	2:57:05 PM	Tube furnace set to 0
5/2/2011	2:58:05 PM	H2 valve closed
5/2/2011	2:58:05 PM	BCl3 valve closed
5/2/2011	2:58:05 PM	PH3 valve closed
5/2/2011	2:58:05 PM	SiCl4 pre valve closed
5/2/2011	2:58:05 PM	SiCl4 post valve closed
5/2/2011	2:58:05 PM	Bubbler valve closed
5/2/2011	2:58:05 PM	Helium valve opened
5/2/2011	2:58:06 PM	Main Vac valve opened
5/2/2011	2:58:06 PM	Bypass valve opened
5/2/2011	2:58:06 PM	Helium MFC set to  100.000000
5/2/2011	2:58:06 PM	H2 MFC set to  0.000000
5/2/2011	2:58:06 PM	BCl3 MFC set to  0.000000
5/2/2011	2:58:06 PM	PHl3 MFC set to  0.000000
5/2/2011	2:58:06 PM	SiCl4 MFC set to  0.000000
5/2/2011	2:58:06 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	2:58:06 PM	Tube furnace set to 0
5/2/2011	2:59:06 PM	Helium valve closed
5/2/2011	2:59:06 PM	H2 valve closed
5/2/2011	2:59:06 PM	BCl3 valve closed
5/2/2011	2:59:06 PM	PH3 valve closed
5/2/2011	2:59:06 PM	SiCl4 pre valve closed
5/2/2011	2:59:06 PM	SiCl4 post valve closed
5/2/2011	2:59:06 PM	Bubbler valve closed
5/2/2011	2:59:06 PM	Main Vac valve opened
5/2/2011	2:59:06 PM	Bypass valve opened
5/2/2011	2:59:06 PM	Helium MFC set to  0.000000
5/2/2011	2:59:06 PM	H2 MFC set to  0.000000
5/2/2011	2:59:06 PM	BCl3 MFC set to  0.000000
5/2/2011	2:59:06 PM	PHl3 MFC set to  0.000000
5/2/2011	2:59:06 PM	SiCl4 MFC set to  0.000000
5/2/2011	2:59:06 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	2:59:06 PM	Tube furnace set to 0
5/2/2011	3:00:06 PM	H2 valve closed
5/2/2011	3:00:06 PM	BCl3 valve closed
5/2/2011	3:00:06 PM	PH3 valve closed
5/2/2011	3:00:06 PM	SiCl4 pre valve closed
5/2/2011	3:00:06 PM	SiCl4 post valve closed
5/2/2011	3:00:06 PM	Bubbler valve closed
5/2/2011	3:00:06 PM	Helium valve opened
5/2/2011	3:00:06 PM	Main Vac valve opened
5/2/2011	3:00:06 PM	Bypass valve opened
5/2/2011	3:00:06 PM	Helium MFC set to  100.000000
5/2/2011	3:00:06 PM	H2 MFC set to  0.000000
5/2/2011	3:00:06 PM	BCl3 MFC set to  0.000000
5/2/2011	3:00:06 PM	PHl3 MFC set to  0.000000
5/2/2011	3:00:06 PM	SiCl4 MFC set to  0.000000
5/2/2011	3:00:06 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	3:00:06 PM	Tube furnace set to 0
5/2/2011	3:01:06 PM	Helium valve closed
5/2/2011	3:01:06 PM	H2 valve closed
5/2/2011	3:01:06 PM	BCl3 valve closed
5/2/2011	3:01:06 PM	PH3 valve closed
5/2/2011	3:01:06 PM	SiCl4 pre valve closed
5/2/2011	3:01:06 PM	SiCl4 post valve closed
5/2/2011	3:01:06 PM	Bubbler valve closed
5/2/2011	3:01:06 PM	Main Vac valve opened
5/2/2011	3:01:06 PM	Bypass valve opened
5/2/2011	3:01:06 PM	Helium MFC set to  0.000000
5/2/2011	3:01:06 PM	H2 MFC set to  0.000000
5/2/2011	3:01:06 PM	BCl3 MFC set to  0.000000
5/2/2011	3:01:06 PM	PHl3 MFC set to  0.000000
5/2/2011	3:01:06 PM	SiCl4 MFC set to  0.000000
5/2/2011	3:01:06 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	3:01:06 PM	Tube furnace set to 0
5/2/2011	3:02:06 PM	H2 valve closed
5/2/2011	3:02:06 PM	BCl3 valve closed
5/2/2011	3:02:06 PM	PH3 valve closed
5/2/2011	3:02:06 PM	SiCl4 pre valve closed
5/2/2011	3:02:06 PM	SiCl4 post valve closed
5/2/2011	3:02:06 PM	Bubbler valve closed
5/2/2011	3:02:06 PM	Helium valve opened
5/2/2011	3:02:06 PM	Main Vac valve opened
5/2/2011	3:02:06 PM	Bypass valve opened
5/2/2011	3:02:06 PM	Helium MFC set to  100.000000
5/2/2011	3:02:06 PM	H2 MFC set to  0.000000
5/2/2011	3:02:06 PM	BCl3 MFC set to  0.000000
5/2/2011	3:02:06 PM	PHl3 MFC set to  0.000000
5/2/2011	3:02:06 PM	SiCl4 MFC set to  0.000000
5/2/2011	3:02:06 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	3:02:06 PM	Tube furnace set to 0
5/2/2011	3:03:06 PM	Helium valve closed
5/2/2011	3:03:06 PM	H2 valve closed
5/2/2011	3:03:06 PM	BCl3 valve closed
5/2/2011	3:03:06 PM	PH3 valve closed
5/2/2011	3:03:07 PM	SiCl4 pre valve closed
5/2/2011	3:03:07 PM	SiCl4 post valve closed
5/2/2011	3:03:07 PM	Bubbler valve closed
5/2/2011	3:03:07 PM	Main Vac valve opened
5/2/2011	3:03:07 PM	Bypass valve opened
5/2/2011	3:03:07 PM	Helium MFC set to  0.000000
5/2/2011	3:03:07 PM	H2 MFC set to  0.000000
5/2/2011	3:03:07 PM	BCl3 MFC set to  0.000000
5/2/2011	3:03:07 PM	PHl3 MFC set to  0.000000
5/2/2011	3:03:07 PM	SiCl4 MFC set to  0.000000
5/2/2011	3:03:07 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	3:03:07 PM	Tube furnace set to 0
5/2/2011	3:04:07 PM	H2 valve closed
5/2/2011	3:04:07 PM	BCl3 valve closed
5/2/2011	3:04:07 PM	PH3 valve closed
5/2/2011	3:04:07 PM	SiCl4 pre valve closed
5/2/2011	3:04:07 PM	SiCl4 post valve closed
5/2/2011	3:04:07 PM	Bubbler valve closed
5/2/2011	3:04:07 PM	Helium valve opened
5/2/2011	3:04:07 PM	Main Vac valve opened
5/2/2011	3:04:07 PM	Bypass valve opened
5/2/2011	3:04:07 PM	Helium MFC set to  100.000000
5/2/2011	3:04:07 PM	H2 MFC set to  0.000000
5/2/2011	3:04:07 PM	BCl3 MFC set to  0.000000
5/2/2011	3:04:07 PM	PHl3 MFC set to  0.000000
5/2/2011	3:04:07 PM	SiCl4 MFC set to  0.000000
5/2/2011	3:04:07 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	3:04:07 PM	Tube furnace set to 0
5/2/2011	3:05:07 PM	Helium valve closed
5/2/2011	3:05:07 PM	H2 valve closed
5/2/2011	3:05:07 PM	BCl3 valve closed
5/2/2011	3:05:07 PM	PH3 valve closed
5/2/2011	3:05:07 PM	SiCl4 pre valve closed
5/2/2011	3:05:07 PM	SiCl4 post valve closed
5/2/2011	3:05:07 PM	Bubbler valve closed
5/2/2011	3:05:07 PM	Main Vac valve opened
5/2/2011	3:05:07 PM	Bypass valve opened
5/2/2011	3:05:07 PM	Helium MFC set to  0.000000
5/2/2011	3:05:07 PM	H2 MFC set to  0.000000
5/2/2011	3:05:07 PM	BCl3 MFC set to  0.000000
5/2/2011	3:05:07 PM	PHl3 MFC set to  0.000000
5/2/2011	3:05:07 PM	SiCl4 MFC set to  0.000000
5/2/2011	3:05:07 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	3:05:07 PM	Tube furnace set to 0
5/2/2011	3:05:08 PM	Run finished at 3:05 PM
5/2/2011	3:05:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/2/2011	3:05:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	3:05:30 PM	Recipe started at 3:05 PM
5/2/2011	3:05:30 PM	Helium valve closed
5/2/2011	3:05:30 PM	H2 valve closed
5/2/2011	3:05:30 PM	BCl3 valve closed
5/2/2011	3:05:30 PM	PH3 valve closed
5/2/2011	3:05:30 PM	SiCl4 pre valve closed
5/2/2011	3:05:30 PM	SiCl4 post valve closed
5/2/2011	3:05:30 PM	Main Vac valve closed
5/2/2011	3:05:30 PM	Bubbler valve closed
5/2/2011	3:05:30 PM	Bypass valve opened
5/2/2011	3:05:30 PM	Helium MFC set to  0.000000
5/2/2011	3:05:30 PM	H2 MFC set to  0.000000
5/2/2011	3:05:30 PM	BCl3 MFC set to  0.000000
5/2/2011	3:05:30 PM	PHl3 MFC set to  0.000000
5/2/2011	3:05:30 PM	SiCl4 MFC set to  0.000000
5/2/2011	3:05:30 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	3:05:30 PM	Tube furnace set to 0
5/2/2011	3:05:30 PM	Helium valve closed
5/2/2011	3:05:30 PM	H2 valve closed
5/2/2011	3:05:30 PM	BCl3 valve closed
5/2/2011	3:05:30 PM	PH3 valve closed
5/2/2011	3:05:30 PM	SiCl4 pre valve closed
5/2/2011	3:05:30 PM	SiCl4 post valve closed
5/2/2011	3:05:30 PM	Bubbler valve closed
5/2/2011	3:05:30 PM	Main Vac valve opened
5/2/2011	3:05:30 PM	Bypass valve opened
5/2/2011	3:05:30 PM	Helium MFC set to  0.000000
5/2/2011	3:05:30 PM	H2 MFC set to  0.000000
5/2/2011	3:05:30 PM	BCl3 MFC set to  0.000000
5/2/2011	3:05:30 PM	PHl3 MFC set to  0.000000
5/2/2011	3:05:30 PM	SiCl4 MFC set to  0.000000
5/2/2011	3:05:30 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	3:05:30 PM	Tube furnace set to 0
5/2/2011	3:05:31 PM	Run finished at 3:05 PM
5/2/2011	3:05:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	3:14:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/2/2011	3:14:59 PM	Recipe started at 3:14 PM
5/2/2011	3:14:59 PM	Helium valve closed
5/2/2011	3:14:59 PM	H2 valve closed
5/2/2011	3:14:59 PM	BCl3 valve closed
5/2/2011	3:14:59 PM	PH3 valve closed
5/2/2011	3:14:59 PM	SiCl4 pre valve closed
5/2/2011	3:14:59 PM	SiCl4 post valve closed
5/2/2011	3:14:59 PM	Main Vac valve closed
5/2/2011	3:14:59 PM	Bypass valve closed
5/2/2011	3:14:59 PM	Bubbler valve closed
5/2/2011	3:14:59 PM	Helium MFC set to  0.000000
5/2/2011	3:14:59 PM	H2 MFC set to  0.000000
5/2/2011	3:14:59 PM	BCl3 MFC set to  0.000000
5/2/2011	3:14:59 PM	PHl3 MFC set to  0.000000
5/2/2011	3:14:59 PM	SiCl4 MFC set to  0.000000
5/2/2011	3:14:59 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	3:14:59 PM	Tube furnace set to 0
5/2/2011	3:14:59 PM	Run finished at 3:14 PM
5/2/2011	3:14:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/2/2011	3:15:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	3:15:17 PM	Recipe started at 3:15 PM
5/2/2011	3:15:17 PM	Helium valve closed
5/2/2011	3:15:17 PM	H2 valve closed
5/2/2011	3:15:17 PM	BCl3 valve closed
5/2/2011	3:15:17 PM	PH3 valve closed
5/2/2011	3:15:17 PM	SiCl4 pre valve closed
5/2/2011	3:15:17 PM	SiCl4 post valve closed
5/2/2011	3:15:17 PM	Main Vac valve closed
5/2/2011	3:15:17 PM	Bubbler valve closed
5/2/2011	3:15:17 PM	Bypass valve opened
5/2/2011	3:15:17 PM	Helium MFC set to  0.000000
5/2/2011	3:15:17 PM	H2 MFC set to  0.000000
5/2/2011	3:15:17 PM	BCl3 MFC set to  0.000000
5/2/2011	3:15:17 PM	PHl3 MFC set to  0.000000
5/2/2011	3:15:17 PM	SiCl4 MFC set to  0.000000
5/2/2011	3:15:17 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	3:15:17 PM	Tube furnace set to 0
5/2/2011	3:15:18 PM	Helium valve closed
5/2/2011	3:15:18 PM	H2 valve closed
5/2/2011	3:15:18 PM	BCl3 valve closed
5/2/2011	3:15:18 PM	PH3 valve closed
5/2/2011	3:15:18 PM	SiCl4 pre valve closed
5/2/2011	3:15:18 PM	SiCl4 post valve closed
5/2/2011	3:15:18 PM	Bubbler valve closed
5/2/2011	3:15:18 PM	Main Vac valve opened
5/2/2011	3:15:18 PM	Bypass valve opened
5/2/2011	3:15:18 PM	Helium MFC set to  0.000000
5/2/2011	3:15:18 PM	H2 MFC set to  0.000000
5/2/2011	3:15:18 PM	BCl3 MFC set to  0.000000
5/2/2011	3:15:18 PM	PHl3 MFC set to  0.000000
5/2/2011	3:15:18 PM	SiCl4 MFC set to  0.000000
5/2/2011	3:15:18 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	3:15:18 PM	Tube furnace set to 0
5/2/2011	3:15:18 PM	Run finished at 3:15 PM
5/2/2011	3:15:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	3:18:39 PM	Recipe started at 3:18 PM
5/2/2011	3:18:39 PM	Helium valve closed
5/2/2011	3:18:39 PM	BCl3 valve closed
5/2/2011	3:18:39 PM	PH3 valve closed
5/2/2011	3:18:39 PM	SiCl4 pre valve closed
5/2/2011	3:18:39 PM	SiCl4 post valve closed
5/2/2011	3:18:39 PM	Main Vac valve closed
5/2/2011	3:18:39 PM	Bypass valve closed
5/2/2011	3:18:39 PM	Bubbler valve closed
5/2/2011	3:18:39 PM	H2 valve opened
5/2/2011	3:18:39 PM	Helium MFC set to  0.000000
5/2/2011	3:18:39 PM	H2 MFC set to  500.000000
5/2/2011	3:18:39 PM	BCl3 MFC set to  0.000000
5/2/2011	3:18:39 PM	PHl3 MFC set to  0.000000
5/2/2011	3:18:39 PM	SiCl4 MFC set to  0.000000
5/2/2011	3:18:39 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	3:18:39 PM	Tube furnace set to 0
5/2/2011	3:20:00 PM	Helium valve closed
5/2/2011	3:20:00 PM	BCl3 valve closed
5/2/2011	3:20:00 PM	PH3 valve closed
5/2/2011	3:20:00 PM	SiCl4 pre valve closed
5/2/2011	3:20:00 PM	SiCl4 post valve closed
5/2/2011	3:20:00 PM	Main Vac valve closed
5/2/2011	3:20:00 PM	Bypass valve closed
5/2/2011	3:20:00 PM	H2 valve opened
5/2/2011	3:20:00 PM	Bubbler valve opened
5/2/2011	3:20:00 PM	Helium MFC set to  0.000000
5/2/2011	3:20:00 PM	H2 MFC set to  500.000000
5/2/2011	3:20:00 PM	BCl3 MFC set to  0.000000
5/2/2011	3:20:00 PM	PHl3 MFC set to  0.000000
5/2/2011	3:20:00 PM	SiCl4 MFC set to  0.000000
5/2/2011	3:20:00 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	3:20:00 PM	Tube furnace set to 1000
5/2/2011	3:40:00 PM	Helium valve closed
5/2/2011	3:40:00 PM	PH3 valve closed
5/2/2011	3:40:00 PM	Main Vac valve closed
5/2/2011	3:40:00 PM	Bypass valve closed
5/2/2011	3:40:00 PM	H2 valve opened
5/2/2011	3:40:00 PM	BCl3 valve opened
5/2/2011	3:40:00 PM	SiCl4 pre valve opened
5/2/2011	3:40:00 PM	SiCl4 post valve opened
5/2/2011	3:40:00 PM	Bubbler valve opened
5/2/2011	3:40:00 PM	Helium MFC set to  0.000000
5/2/2011	3:40:00 PM	H2 MFC set to  500.000000
5/2/2011	3:40:00 PM	BCl3 MFC set to  5.000000
5/2/2011	3:40:00 PM	PHl3 MFC set to  0.000000
5/2/2011	3:40:00 PM	SiCl4 MFC set to  50.000000
5/2/2011	3:40:00 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	3:40:00 PM	Tube furnace set to 1000
5/2/2011	3:56:00 PM	H2 valve closed
5/2/2011	3:56:00 PM	BCl3 valve closed
5/2/2011	3:56:00 PM	PH3 valve closed
5/2/2011	3:56:00 PM	SiCl4 pre valve closed
5/2/2011	3:56:00 PM	SiCl4 post valve closed
5/2/2011	3:56:00 PM	Main Vac valve closed
5/2/2011	3:56:00 PM	Bypass valve closed
5/2/2011	3:56:00 PM	Helium valve opened
5/2/2011	3:56:00 PM	Bubbler valve opened
5/2/2011	3:56:00 PM	Helium MFC set to  500.000000
5/2/2011	3:56:00 PM	H2 MFC set to  0.000000
5/2/2011	3:56:00 PM	BCl3 MFC set to  0.000000
5/2/2011	3:56:00 PM	PHl3 MFC set to  0.000000
5/2/2011	3:56:00 PM	SiCl4 MFC set to  0.000000
5/2/2011	3:56:00 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	3:56:00 PM	Tube furnace set to 0
5/2/2011	4:16:00 PM	Helium valve closed
5/2/2011	4:16:00 PM	H2 valve closed
5/2/2011	4:16:00 PM	BCl3 valve closed
5/2/2011	4:16:00 PM	PH3 valve closed
5/2/2011	4:16:00 PM	SiCl4 pre valve closed
5/2/2011	4:16:00 PM	SiCl4 post valve closed
5/2/2011	4:16:00 PM	Main Vac valve closed
5/2/2011	4:16:00 PM	Bypass valve closed
5/2/2011	4:16:00 PM	Bubbler valve closed
5/2/2011	4:16:00 PM	Helium MFC set to  0.000000
5/2/2011	4:16:00 PM	H2 MFC set to  0.000000
5/2/2011	4:16:00 PM	BCl3 MFC set to  0.000000
5/2/2011	4:16:00 PM	PHl3 MFC set to  0.000000
5/2/2011	4:16:00 PM	SiCl4 MFC set to  0.000000
5/2/2011	4:16:00 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	4:16:00 PM	Tube furnace set to 0
5/2/2011	4:16:01 PM	Run finished at 4:16 PM
5/2/2011	5:38:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	5:38:59 PM	Recipe started at 5:38 PM
5/2/2011	5:38:59 PM	Helium valve closed
5/2/2011	5:38:59 PM	H2 valve closed
5/2/2011	5:38:59 PM	BCl3 valve closed
5/2/2011	5:38:59 PM	PH3 valve closed
5/2/2011	5:38:59 PM	SiCl4 pre valve closed
5/2/2011	5:38:59 PM	SiCl4 post valve closed
5/2/2011	5:38:59 PM	Main Vac valve closed
5/2/2011	5:38:59 PM	Bubbler valve closed
5/2/2011	5:38:59 PM	Bypass valve opened
5/2/2011	5:38:59 PM	Helium MFC set to  0.000000
5/2/2011	5:38:59 PM	H2 MFC set to  0.000000
5/2/2011	5:38:59 PM	BCl3 MFC set to  0.000000
5/2/2011	5:38:59 PM	PHl3 MFC set to  0.000000
5/2/2011	5:38:59 PM	SiCl4 MFC set to  0.000000
5/2/2011	5:38:59 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	5:38:59 PM	Tube furnace set to 0
5/2/2011	5:39:33 PM	Helium valve closed
5/2/2011	5:39:33 PM	H2 valve closed
5/2/2011	5:39:33 PM	BCl3 valve closed
5/2/2011	5:39:33 PM	PH3 valve closed
5/2/2011	5:39:33 PM	SiCl4 pre valve closed
5/2/2011	5:39:33 PM	SiCl4 post valve closed
5/2/2011	5:39:33 PM	Bubbler valve closed
5/2/2011	5:39:33 PM	Main Vac valve opened
5/2/2011	5:39:33 PM	Bypass valve opened
5/2/2011	5:39:33 PM	Helium MFC set to  0.000000
5/2/2011	5:39:33 PM	H2 MFC set to  0.000000
5/2/2011	5:39:33 PM	BCl3 MFC set to  0.000000
5/2/2011	5:39:33 PM	PHl3 MFC set to  0.000000
5/2/2011	5:39:33 PM	SiCl4 MFC set to  0.000000
5/2/2011	5:39:33 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	5:39:33 PM	Tube furnace set to 0
5/2/2011	5:39:33 PM	Run finished at 5:39 PM
5/2/2011	5:39:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	6:17:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/2/2011	6:17:33 PM	Recipe started at 6:17 PM
5/2/2011	6:17:33 PM	Helium valve closed
5/2/2011	6:17:33 PM	H2 valve closed
5/2/2011	6:17:33 PM	BCl3 valve closed
5/2/2011	6:17:33 PM	PH3 valve closed
5/2/2011	6:17:33 PM	SiCl4 pre valve closed
5/2/2011	6:17:33 PM	SiCl4 post valve closed
5/2/2011	6:17:33 PM	Main Vac valve closed
5/2/2011	6:17:33 PM	Bubbler valve closed
5/2/2011	6:17:33 PM	Bypass valve opened
5/2/2011	6:17:33 PM	Helium MFC set to  0.000000
5/2/2011	6:17:33 PM	H2 MFC set to  0.000000
5/2/2011	6:17:33 PM	BCl3 MFC set to  0.000000
5/2/2011	6:17:33 PM	PHl3 MFC set to  0.000000
5/2/2011	6:17:33 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:17:33 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:17:33 PM	Tube furnace set to 0
5/2/2011	6:17:34 PM	Helium valve closed
5/2/2011	6:17:34 PM	H2 valve closed
5/2/2011	6:17:34 PM	BCl3 valve closed
5/2/2011	6:17:34 PM	PH3 valve closed
5/2/2011	6:17:34 PM	SiCl4 pre valve closed
5/2/2011	6:17:34 PM	SiCl4 post valve closed
5/2/2011	6:17:34 PM	Bubbler valve closed
5/2/2011	6:17:34 PM	Main Vac valve opened
5/2/2011	6:17:34 PM	Bypass valve opened
5/2/2011	6:17:34 PM	Helium MFC set to  0.000000
5/2/2011	6:17:34 PM	H2 MFC set to  0.000000
5/2/2011	6:17:34 PM	BCl3 MFC set to  0.000000
5/2/2011	6:17:34 PM	PHl3 MFC set to  0.000000
5/2/2011	6:17:34 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:17:34 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:17:34 PM	Tube furnace set to 0
5/2/2011	6:18:34 PM	H2 valve closed
5/2/2011	6:18:34 PM	BCl3 valve closed
5/2/2011	6:18:34 PM	PH3 valve closed
5/2/2011	6:18:34 PM	SiCl4 pre valve closed
5/2/2011	6:18:34 PM	SiCl4 post valve closed
5/2/2011	6:18:34 PM	Bubbler valve closed
5/2/2011	6:18:34 PM	Helium valve opened
5/2/2011	6:18:34 PM	Main Vac valve opened
5/2/2011	6:18:34 PM	Bypass valve opened
5/2/2011	6:18:34 PM	Helium MFC set to  100.000000
5/2/2011	6:18:34 PM	H2 MFC set to  0.000000
5/2/2011	6:18:34 PM	BCl3 MFC set to  0.000000
5/2/2011	6:18:34 PM	PHl3 MFC set to  0.000000
5/2/2011	6:18:34 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:18:34 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:18:34 PM	Tube furnace set to 0
5/2/2011	6:19:34 PM	Helium valve closed
5/2/2011	6:19:34 PM	H2 valve closed
5/2/2011	6:19:34 PM	BCl3 valve closed
5/2/2011	6:19:34 PM	PH3 valve closed
5/2/2011	6:19:34 PM	SiCl4 pre valve closed
5/2/2011	6:19:34 PM	SiCl4 post valve closed
5/2/2011	6:19:34 PM	Bubbler valve closed
5/2/2011	6:19:34 PM	Main Vac valve opened
5/2/2011	6:19:34 PM	Bypass valve opened
5/2/2011	6:19:34 PM	Helium MFC set to  0.000000
5/2/2011	6:19:34 PM	H2 MFC set to  0.000000
5/2/2011	6:19:34 PM	BCl3 MFC set to  0.000000
5/2/2011	6:19:34 PM	PHl3 MFC set to  0.000000
5/2/2011	6:19:34 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:19:34 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:19:34 PM	Tube furnace set to 0
5/2/2011	6:20:34 PM	H2 valve closed
5/2/2011	6:20:34 PM	BCl3 valve closed
5/2/2011	6:20:34 PM	PH3 valve closed
5/2/2011	6:20:34 PM	SiCl4 pre valve closed
5/2/2011	6:20:34 PM	SiCl4 post valve closed
5/2/2011	6:20:34 PM	Bubbler valve closed
5/2/2011	6:20:34 PM	Helium valve opened
5/2/2011	6:20:34 PM	Main Vac valve opened
5/2/2011	6:20:34 PM	Bypass valve opened
5/2/2011	6:20:34 PM	Helium MFC set to  100.000000
5/2/2011	6:20:34 PM	H2 MFC set to  0.000000
5/2/2011	6:20:34 PM	BCl3 MFC set to  0.000000
5/2/2011	6:20:34 PM	PHl3 MFC set to  0.000000
5/2/2011	6:20:34 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:20:34 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:20:35 PM	Tube furnace set to 0
5/2/2011	6:21:35 PM	Helium valve closed
5/2/2011	6:21:35 PM	H2 valve closed
5/2/2011	6:21:35 PM	BCl3 valve closed
5/2/2011	6:21:35 PM	PH3 valve closed
5/2/2011	6:21:35 PM	SiCl4 pre valve closed
5/2/2011	6:21:35 PM	SiCl4 post valve closed
5/2/2011	6:21:35 PM	Bubbler valve closed
5/2/2011	6:21:35 PM	Main Vac valve opened
5/2/2011	6:21:35 PM	Bypass valve opened
5/2/2011	6:21:35 PM	Helium MFC set to  0.000000
5/2/2011	6:21:35 PM	H2 MFC set to  0.000000
5/2/2011	6:21:35 PM	BCl3 MFC set to  0.000000
5/2/2011	6:21:35 PM	PHl3 MFC set to  0.000000
5/2/2011	6:21:35 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:21:35 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:21:35 PM	Tube furnace set to 0
5/2/2011	6:22:35 PM	H2 valve closed
5/2/2011	6:22:35 PM	BCl3 valve closed
5/2/2011	6:22:35 PM	PH3 valve closed
5/2/2011	6:22:35 PM	SiCl4 pre valve closed
5/2/2011	6:22:35 PM	SiCl4 post valve closed
5/2/2011	6:22:35 PM	Bubbler valve closed
5/2/2011	6:22:35 PM	Helium valve opened
5/2/2011	6:22:35 PM	Main Vac valve opened
5/2/2011	6:22:35 PM	Bypass valve opened
5/2/2011	6:22:35 PM	Helium MFC set to  100.000000
5/2/2011	6:22:35 PM	H2 MFC set to  0.000000
5/2/2011	6:22:35 PM	BCl3 MFC set to  0.000000
5/2/2011	6:22:35 PM	PHl3 MFC set to  0.000000
5/2/2011	6:22:35 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:22:35 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:22:35 PM	Tube furnace set to 0
5/2/2011	6:23:35 PM	Helium valve closed
5/2/2011	6:23:35 PM	H2 valve closed
5/2/2011	6:23:35 PM	BCl3 valve closed
5/2/2011	6:23:35 PM	PH3 valve closed
5/2/2011	6:23:35 PM	SiCl4 pre valve closed
5/2/2011	6:23:35 PM	SiCl4 post valve closed
5/2/2011	6:23:35 PM	Bubbler valve closed
5/2/2011	6:23:35 PM	Main Vac valve opened
5/2/2011	6:23:35 PM	Bypass valve opened
5/2/2011	6:23:35 PM	Helium MFC set to  0.000000
5/2/2011	6:23:35 PM	H2 MFC set to  0.000000
5/2/2011	6:23:35 PM	BCl3 MFC set to  0.000000
5/2/2011	6:23:35 PM	PHl3 MFC set to  0.000000
5/2/2011	6:23:35 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:23:35 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:23:35 PM	Tube furnace set to 0
5/2/2011	6:24:35 PM	H2 valve closed
5/2/2011	6:24:35 PM	BCl3 valve closed
5/2/2011	6:24:35 PM	PH3 valve closed
5/2/2011	6:24:35 PM	SiCl4 pre valve closed
5/2/2011	6:24:35 PM	SiCl4 post valve closed
5/2/2011	6:24:35 PM	Bubbler valve closed
5/2/2011	6:24:35 PM	Helium valve opened
5/2/2011	6:24:35 PM	Main Vac valve opened
5/2/2011	6:24:35 PM	Bypass valve opened
5/2/2011	6:24:35 PM	Helium MFC set to  100.000000
5/2/2011	6:24:35 PM	H2 MFC set to  0.000000
5/2/2011	6:24:35 PM	BCl3 MFC set to  0.000000
5/2/2011	6:24:35 PM	PHl3 MFC set to  0.000000
5/2/2011	6:24:35 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:24:35 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:24:35 PM	Tube furnace set to 0
5/2/2011	6:25:35 PM	Helium valve closed
5/2/2011	6:25:35 PM	H2 valve closed
5/2/2011	6:25:35 PM	BCl3 valve closed
5/2/2011	6:25:35 PM	PH3 valve closed
5/2/2011	6:25:35 PM	SiCl4 pre valve closed
5/2/2011	6:25:35 PM	SiCl4 post valve closed
5/2/2011	6:25:35 PM	Bubbler valve closed
5/2/2011	6:25:35 PM	Main Vac valve opened
5/2/2011	6:25:35 PM	Bypass valve opened
5/2/2011	6:25:35 PM	Helium MFC set to  0.000000
5/2/2011	6:25:35 PM	H2 MFC set to  0.000000
5/2/2011	6:25:35 PM	BCl3 MFC set to  0.000000
5/2/2011	6:25:35 PM	PHl3 MFC set to  0.000000
5/2/2011	6:25:35 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:25:35 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:25:36 PM	Tube furnace set to 0
5/2/2011	6:26:36 PM	H2 valve closed
5/2/2011	6:26:36 PM	BCl3 valve closed
5/2/2011	6:26:36 PM	PH3 valve closed
5/2/2011	6:26:36 PM	SiCl4 pre valve closed
5/2/2011	6:26:36 PM	SiCl4 post valve closed
5/2/2011	6:26:36 PM	Bubbler valve closed
5/2/2011	6:26:36 PM	Helium valve opened
5/2/2011	6:26:36 PM	Main Vac valve opened
5/2/2011	6:26:36 PM	Bypass valve opened
5/2/2011	6:26:36 PM	Helium MFC set to  100.000000
5/2/2011	6:26:36 PM	H2 MFC set to  0.000000
5/2/2011	6:26:36 PM	BCl3 MFC set to  0.000000
5/2/2011	6:26:36 PM	PHl3 MFC set to  0.000000
5/2/2011	6:26:36 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:26:36 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:26:36 PM	Tube furnace set to 0
5/2/2011	6:27:36 PM	Helium valve closed
5/2/2011	6:27:36 PM	H2 valve closed
5/2/2011	6:27:36 PM	BCl3 valve closed
5/2/2011	6:27:36 PM	PH3 valve closed
5/2/2011	6:27:36 PM	SiCl4 pre valve closed
5/2/2011	6:27:36 PM	SiCl4 post valve closed
5/2/2011	6:27:36 PM	Bubbler valve closed
5/2/2011	6:27:36 PM	Main Vac valve opened
5/2/2011	6:27:36 PM	Bypass valve opened
5/2/2011	6:27:36 PM	Helium MFC set to  0.000000
5/2/2011	6:27:36 PM	H2 MFC set to  0.000000
5/2/2011	6:27:36 PM	BCl3 MFC set to  0.000000
5/2/2011	6:27:36 PM	PHl3 MFC set to  0.000000
5/2/2011	6:27:36 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:27:36 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:27:36 PM	Tube furnace set to 0
5/2/2011	6:28:36 PM	H2 valve closed
5/2/2011	6:28:36 PM	BCl3 valve closed
5/2/2011	6:28:36 PM	PH3 valve closed
5/2/2011	6:28:36 PM	SiCl4 pre valve closed
5/2/2011	6:28:36 PM	SiCl4 post valve closed
5/2/2011	6:28:36 PM	Bubbler valve closed
5/2/2011	6:28:36 PM	Helium valve opened
5/2/2011	6:28:36 PM	Main Vac valve opened
5/2/2011	6:28:36 PM	Bypass valve opened
5/2/2011	6:28:36 PM	Helium MFC set to  100.000000
5/2/2011	6:28:36 PM	H2 MFC set to  0.000000
5/2/2011	6:28:36 PM	BCl3 MFC set to  0.000000
5/2/2011	6:28:36 PM	PHl3 MFC set to  0.000000
5/2/2011	6:28:36 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:28:36 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:28:36 PM	Tube furnace set to 0
5/2/2011	6:29:36 PM	Helium valve closed
5/2/2011	6:29:36 PM	H2 valve closed
5/2/2011	6:29:36 PM	BCl3 valve closed
5/2/2011	6:29:36 PM	PH3 valve closed
5/2/2011	6:29:36 PM	SiCl4 pre valve closed
5/2/2011	6:29:36 PM	SiCl4 post valve closed
5/2/2011	6:29:36 PM	Bubbler valve closed
5/2/2011	6:29:36 PM	Main Vac valve opened
5/2/2011	6:29:36 PM	Bypass valve opened
5/2/2011	6:29:36 PM	Helium MFC set to  0.000000
5/2/2011	6:29:36 PM	H2 MFC set to  0.000000
5/2/2011	6:29:36 PM	BCl3 MFC set to  0.000000
5/2/2011	6:29:36 PM	PHl3 MFC set to  0.000000
5/2/2011	6:29:36 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:29:36 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:29:36 PM	Tube furnace set to 0
5/2/2011	6:30:36 PM	H2 valve closed
5/2/2011	6:30:36 PM	BCl3 valve closed
5/2/2011	6:30:36 PM	PH3 valve closed
5/2/2011	6:30:36 PM	SiCl4 pre valve closed
5/2/2011	6:30:36 PM	SiCl4 post valve closed
5/2/2011	6:30:36 PM	Bubbler valve closed
5/2/2011	6:30:36 PM	Helium valve opened
5/2/2011	6:30:36 PM	Main Vac valve opened
5/2/2011	6:30:36 PM	Bypass valve opened
5/2/2011	6:30:36 PM	Helium MFC set to  100.000000
5/2/2011	6:30:36 PM	H2 MFC set to  0.000000
5/2/2011	6:30:36 PM	BCl3 MFC set to  0.000000
5/2/2011	6:30:36 PM	PHl3 MFC set to  0.000000
5/2/2011	6:30:36 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:30:36 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:30:37 PM	Tube furnace set to 0
5/2/2011	6:31:37 PM	Helium valve closed
5/2/2011	6:31:37 PM	H2 valve closed
5/2/2011	6:31:37 PM	BCl3 valve closed
5/2/2011	6:31:37 PM	PH3 valve closed
5/2/2011	6:31:37 PM	SiCl4 pre valve closed
5/2/2011	6:31:37 PM	SiCl4 post valve closed
5/2/2011	6:31:37 PM	Bubbler valve closed
5/2/2011	6:31:37 PM	Main Vac valve opened
5/2/2011	6:31:37 PM	Bypass valve opened
5/2/2011	6:31:37 PM	Helium MFC set to  0.000000
5/2/2011	6:31:37 PM	H2 MFC set to  0.000000
5/2/2011	6:31:37 PM	BCl3 MFC set to  0.000000
5/2/2011	6:31:37 PM	PHl3 MFC set to  0.000000
5/2/2011	6:31:37 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:31:37 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:31:37 PM	Tube furnace set to 0
5/2/2011	6:32:37 PM	H2 valve closed
5/2/2011	6:32:37 PM	BCl3 valve closed
5/2/2011	6:32:37 PM	PH3 valve closed
5/2/2011	6:32:37 PM	SiCl4 pre valve closed
5/2/2011	6:32:37 PM	SiCl4 post valve closed
5/2/2011	6:32:37 PM	Bubbler valve closed
5/2/2011	6:32:37 PM	Helium valve opened
5/2/2011	6:32:37 PM	Main Vac valve opened
5/2/2011	6:32:37 PM	Bypass valve opened
5/2/2011	6:32:37 PM	Helium MFC set to  100.000000
5/2/2011	6:32:37 PM	H2 MFC set to  0.000000
5/2/2011	6:32:37 PM	BCl3 MFC set to  0.000000
5/2/2011	6:32:37 PM	PHl3 MFC set to  0.000000
5/2/2011	6:32:37 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:32:37 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:32:37 PM	Tube furnace set to 0
5/2/2011	6:33:37 PM	Helium valve closed
5/2/2011	6:33:37 PM	H2 valve closed
5/2/2011	6:33:37 PM	BCl3 valve closed
5/2/2011	6:33:37 PM	PH3 valve closed
5/2/2011	6:33:37 PM	SiCl4 pre valve closed
5/2/2011	6:33:37 PM	SiCl4 post valve closed
5/2/2011	6:33:37 PM	Bubbler valve closed
5/2/2011	6:33:37 PM	Main Vac valve opened
5/2/2011	6:33:37 PM	Bypass valve opened
5/2/2011	6:33:37 PM	Helium MFC set to  0.000000
5/2/2011	6:33:37 PM	H2 MFC set to  0.000000
5/2/2011	6:33:37 PM	BCl3 MFC set to  0.000000
5/2/2011	6:33:37 PM	PHl3 MFC set to  0.000000
5/2/2011	6:33:37 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:33:37 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:33:37 PM	Tube furnace set to 0
5/2/2011	6:34:37 PM	H2 valve closed
5/2/2011	6:34:37 PM	BCl3 valve closed
5/2/2011	6:34:37 PM	PH3 valve closed
5/2/2011	6:34:37 PM	SiCl4 pre valve closed
5/2/2011	6:34:37 PM	SiCl4 post valve closed
5/2/2011	6:34:37 PM	Bubbler valve closed
5/2/2011	6:34:37 PM	Helium valve opened
5/2/2011	6:34:37 PM	Main Vac valve opened
5/2/2011	6:34:37 PM	Bypass valve opened
5/2/2011	6:34:37 PM	Helium MFC set to  100.000000
5/2/2011	6:34:37 PM	H2 MFC set to  0.000000
5/2/2011	6:34:37 PM	BCl3 MFC set to  0.000000
5/2/2011	6:34:37 PM	PHl3 MFC set to  0.000000
5/2/2011	6:34:37 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:34:37 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:34:37 PM	Tube furnace set to 0
5/2/2011	6:35:37 PM	Helium valve closed
5/2/2011	6:35:37 PM	H2 valve closed
5/2/2011	6:35:37 PM	BCl3 valve closed
5/2/2011	6:35:37 PM	PH3 valve closed
5/2/2011	6:35:37 PM	SiCl4 pre valve closed
5/2/2011	6:35:37 PM	SiCl4 post valve closed
5/2/2011	6:35:37 PM	Bubbler valve closed
5/2/2011	6:35:37 PM	Main Vac valve opened
5/2/2011	6:35:37 PM	Bypass valve opened
5/2/2011	6:35:37 PM	Helium MFC set to  0.000000
5/2/2011	6:35:37 PM	H2 MFC set to  0.000000
5/2/2011	6:35:37 PM	BCl3 MFC set to  0.000000
5/2/2011	6:35:37 PM	PHl3 MFC set to  0.000000
5/2/2011	6:35:37 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:35:37 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:35:38 PM	Tube furnace set to 0
5/2/2011	6:36:38 PM	H2 valve closed
5/2/2011	6:36:38 PM	BCl3 valve closed
5/2/2011	6:36:38 PM	PH3 valve closed
5/2/2011	6:36:38 PM	SiCl4 pre valve closed
5/2/2011	6:36:38 PM	SiCl4 post valve closed
5/2/2011	6:36:38 PM	Bubbler valve closed
5/2/2011	6:36:38 PM	Helium valve opened
5/2/2011	6:36:38 PM	Main Vac valve opened
5/2/2011	6:36:38 PM	Bypass valve opened
5/2/2011	6:36:38 PM	Helium MFC set to  100.000000
5/2/2011	6:36:38 PM	H2 MFC set to  0.000000
5/2/2011	6:36:38 PM	BCl3 MFC set to  0.000000
5/2/2011	6:36:38 PM	PHl3 MFC set to  0.000000
5/2/2011	6:36:38 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:36:38 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:36:38 PM	Tube furnace set to 0
5/2/2011	6:37:38 PM	Helium valve closed
5/2/2011	6:37:38 PM	H2 valve closed
5/2/2011	6:37:38 PM	BCl3 valve closed
5/2/2011	6:37:38 PM	PH3 valve closed
5/2/2011	6:37:38 PM	SiCl4 pre valve closed
5/2/2011	6:37:38 PM	SiCl4 post valve closed
5/2/2011	6:37:38 PM	Bubbler valve closed
5/2/2011	6:37:38 PM	Main Vac valve opened
5/2/2011	6:37:38 PM	Bypass valve opened
5/2/2011	6:37:38 PM	Helium MFC set to  0.000000
5/2/2011	6:37:38 PM	H2 MFC set to  0.000000
5/2/2011	6:37:38 PM	BCl3 MFC set to  0.000000
5/2/2011	6:37:38 PM	PHl3 MFC set to  0.000000
5/2/2011	6:37:38 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:37:38 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:37:38 PM	Tube furnace set to 0
5/2/2011	6:37:39 PM	Run finished at 6:37 PM
5/2/2011	6:37:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/2/2011	6:38:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/2/2011	6:38:17 PM	Recipe started at 6:38 PM
5/2/2011	6:38:17 PM	Helium valve closed
5/2/2011	6:38:17 PM	H2 valve closed
5/2/2011	6:38:17 PM	BCl3 valve closed
5/2/2011	6:38:17 PM	PH3 valve closed
5/2/2011	6:38:17 PM	SiCl4 pre valve closed
5/2/2011	6:38:17 PM	SiCl4 post valve closed
5/2/2011	6:38:17 PM	Main Vac valve closed
5/2/2011	6:38:17 PM	Bypass valve closed
5/2/2011	6:38:17 PM	Bubbler valve closed
5/2/2011	6:38:17 PM	Helium MFC set to  0.000000
5/2/2011	6:38:17 PM	H2 MFC set to  0.000000
5/2/2011	6:38:17 PM	BCl3 MFC set to  0.000000
5/2/2011	6:38:17 PM	PHl3 MFC set to  0.000000
5/2/2011	6:38:17 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:38:17 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:38:17 PM	Tube furnace set to 0
5/2/2011	6:38:17 PM	Run finished at 6:38 PM
5/2/2011	6:38:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/2/2011	6:38:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	6:38:32 PM	Recipe started at 6:38 PM
5/2/2011	6:38:32 PM	Helium valve closed
5/2/2011	6:38:32 PM	H2 valve closed
5/2/2011	6:38:32 PM	BCl3 valve closed
5/2/2011	6:38:32 PM	PH3 valve closed
5/2/2011	6:38:32 PM	SiCl4 pre valve closed
5/2/2011	6:38:32 PM	SiCl4 post valve closed
5/2/2011	6:38:32 PM	Main Vac valve closed
5/2/2011	6:38:32 PM	Bubbler valve closed
5/2/2011	6:38:32 PM	Bypass valve opened
5/2/2011	6:38:32 PM	Helium MFC set to  0.000000
5/2/2011	6:38:32 PM	H2 MFC set to  0.000000
5/2/2011	6:38:32 PM	BCl3 MFC set to  0.000000
5/2/2011	6:38:32 PM	PHl3 MFC set to  0.000000
5/2/2011	6:38:32 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:38:32 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:38:32 PM	Tube furnace set to 0
5/2/2011	6:38:33 PM	Helium valve closed
5/2/2011	6:38:33 PM	H2 valve closed
5/2/2011	6:38:33 PM	BCl3 valve closed
5/2/2011	6:38:33 PM	PH3 valve closed
5/2/2011	6:38:33 PM	SiCl4 pre valve closed
5/2/2011	6:38:33 PM	SiCl4 post valve closed
5/2/2011	6:38:33 PM	Bubbler valve closed
5/2/2011	6:38:33 PM	Main Vac valve opened
5/2/2011	6:38:33 PM	Bypass valve opened
5/2/2011	6:38:33 PM	Helium MFC set to  0.000000
5/2/2011	6:38:33 PM	H2 MFC set to  0.000000
5/2/2011	6:38:33 PM	BCl3 MFC set to  0.000000
5/2/2011	6:38:33 PM	PHl3 MFC set to  0.000000
5/2/2011	6:38:33 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:38:33 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:38:33 PM	Tube furnace set to 0
5/2/2011	6:38:33 PM	Run finished at 6:38 PM
5/2/2011	6:38:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	6:38:45 PM	Recipe started at 6:38 PM
5/2/2011	6:38:45 PM	Helium valve closed
5/2/2011	6:38:45 PM	BCl3 valve closed
5/2/2011	6:38:45 PM	PH3 valve closed
5/2/2011	6:38:45 PM	SiCl4 pre valve closed
5/2/2011	6:38:45 PM	SiCl4 post valve closed
5/2/2011	6:38:45 PM	Main Vac valve closed
5/2/2011	6:38:45 PM	Bypass valve closed
5/2/2011	6:38:45 PM	Bubbler valve closed
5/2/2011	6:38:45 PM	H2 valve opened
5/2/2011	6:38:45 PM	Helium MFC set to  0.000000
5/2/2011	6:38:45 PM	H2 MFC set to  500.000000
5/2/2011	6:38:45 PM	BCl3 MFC set to  0.000000
5/2/2011	6:38:45 PM	PHl3 MFC set to  0.000000
5/2/2011	6:38:45 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:38:45 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:38:45 PM	Tube furnace set to 0
5/2/2011	6:40:07 PM	Helium valve closed
5/2/2011	6:40:07 PM	BCl3 valve closed
5/2/2011	6:40:07 PM	PH3 valve closed
5/2/2011	6:40:07 PM	SiCl4 pre valve closed
5/2/2011	6:40:07 PM	SiCl4 post valve closed
5/2/2011	6:40:07 PM	Main Vac valve closed
5/2/2011	6:40:07 PM	Bypass valve closed
5/2/2011	6:40:07 PM	H2 valve opened
5/2/2011	6:40:07 PM	Bubbler valve opened
5/2/2011	6:40:07 PM	Helium MFC set to  0.000000
5/2/2011	6:40:07 PM	H2 MFC set to  500.000000
5/2/2011	6:40:07 PM	BCl3 MFC set to  0.000000
5/2/2011	6:40:07 PM	PHl3 MFC set to  0.000000
5/2/2011	6:40:07 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:40:07 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:40:07 PM	Tube furnace set to 1000
5/2/2011	6:40:07 PM	Helium valve closed
5/2/2011	6:40:07 PM	H2 valve closed
5/2/2011	6:40:08 PM	BCl3 valve closed
5/2/2011	6:40:08 PM	PH3 valve closed
5/2/2011	6:40:08 PM	SiCl4 pre valve closed
5/2/2011	6:40:08 PM	SiCl4 post valve closed
5/2/2011	6:40:08 PM	Main Vac valve closed
5/2/2011	6:40:08 PM	Bubbler valve closed
5/2/2011	6:40:08 PM	Bypass valve closed
5/2/2011	6:40:08 PM	Helium MFC set to  0.000000
5/2/2011	6:40:08 PM	H2 MFC set to  0.000000
5/2/2011	6:40:08 PM	BCl3 MFC set to  0.000000
5/2/2011	6:40:08 PM	PHl3 MFC set to  0.000000
5/2/2011	6:40:08 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:40:08 PM	Bypass solenoid MFC set to  760.000000
5/2/2011	6:40:08 PM	Tube furnace set to 0
5/2/2011	6:40:08 PM	Baratron reads 745.401633 Torr and NaOH valve is open.  Emergency exit.
5/2/2011	6:40:13 PM	Run aborted at 6:40 PM
5/2/2011	6:40:19 PM	Recipe started at 6:40 PM
5/2/2011	6:40:19 PM	Helium valve closed
5/2/2011	6:40:19 PM	BCl3 valve closed
5/2/2011	6:40:19 PM	PH3 valve closed
5/2/2011	6:40:19 PM	SiCl4 pre valve closed
5/2/2011	6:40:19 PM	SiCl4 post valve closed
5/2/2011	6:40:19 PM	Main Vac valve closed
5/2/2011	6:40:19 PM	Bypass valve closed
5/2/2011	6:40:19 PM	Bubbler valve closed
5/2/2011	6:40:19 PM	H2 valve opened
5/2/2011	6:40:19 PM	Helium MFC set to  0.000000
5/2/2011	6:40:19 PM	H2 MFC set to  500.000000
5/2/2011	6:40:19 PM	BCl3 MFC set to  0.000000
5/2/2011	6:40:19 PM	PHl3 MFC set to  0.000000
5/2/2011	6:40:19 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:40:19 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:40:20 PM	Tube furnace set to 0
5/2/2011	6:40:23 PM	Helium valve closed
5/2/2011	6:40:23 PM	BCl3 valve closed
5/2/2011	6:40:23 PM	PH3 valve closed
5/2/2011	6:40:23 PM	SiCl4 pre valve closed
5/2/2011	6:40:23 PM	SiCl4 post valve closed
5/2/2011	6:40:23 PM	Main Vac valve closed
5/2/2011	6:40:23 PM	Bypass valve closed
5/2/2011	6:40:23 PM	H2 valve opened
5/2/2011	6:40:23 PM	Bubbler valve opened
5/2/2011	6:40:23 PM	Helium MFC set to  0.000000
5/2/2011	6:40:23 PM	H2 MFC set to  500.000000
5/2/2011	6:40:23 PM	BCl3 MFC set to  0.000000
5/2/2011	6:40:23 PM	PHl3 MFC set to  0.000000
5/2/2011	6:40:23 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:40:23 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:40:23 PM	Tube furnace set to 1000
5/2/2011	6:40:23 PM	Helium valve closed
5/2/2011	6:40:23 PM	H2 valve closed
5/2/2011	6:40:23 PM	BCl3 valve closed
5/2/2011	6:40:23 PM	PH3 valve closed
5/2/2011	6:40:23 PM	SiCl4 pre valve closed
5/2/2011	6:40:23 PM	SiCl4 post valve closed
5/2/2011	6:40:23 PM	Main Vac valve closed
5/2/2011	6:40:23 PM	Bubbler valve closed
5/2/2011	6:40:23 PM	Bypass valve closed
5/2/2011	6:40:23 PM	Helium MFC set to  0.000000
5/2/2011	6:40:23 PM	H2 MFC set to  0.000000
5/2/2011	6:40:23 PM	BCl3 MFC set to  0.000000
5/2/2011	6:40:23 PM	PHl3 MFC set to  0.000000
5/2/2011	6:40:23 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:40:23 PM	Bypass solenoid MFC set to  760.000000
5/2/2011	6:40:23 PM	Tube furnace set to 0
5/2/2011	6:40:23 PM	Baratron reads 744.380805 Torr and NaOH valve is open.  Emergency exit.
5/2/2011	6:40:31 PM	Run aborted at 6:40 PM
5/2/2011	6:40:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	6:40:45 PM	Recipe started at 6:40 PM
5/2/2011	6:40:46 PM	Helium valve closed
5/2/2011	6:40:46 PM	H2 valve closed
5/2/2011	6:40:46 PM	BCl3 valve closed
5/2/2011	6:40:46 PM	PH3 valve closed
5/2/2011	6:40:46 PM	SiCl4 pre valve closed
5/2/2011	6:40:46 PM	SiCl4 post valve closed
5/2/2011	6:40:46 PM	Main Vac valve closed
5/2/2011	6:40:46 PM	Bubbler valve closed
5/2/2011	6:40:46 PM	Bypass valve opened
5/2/2011	6:40:46 PM	Helium MFC set to  0.000000
5/2/2011	6:40:46 PM	H2 MFC set to  0.000000
5/2/2011	6:40:46 PM	BCl3 MFC set to  0.000000
5/2/2011	6:40:46 PM	PHl3 MFC set to  0.000000
5/2/2011	6:40:46 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:40:46 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:40:46 PM	Tube furnace set to 0
5/2/2011	6:41:00 PM	Helium valve closed
5/2/2011	6:41:00 PM	H2 valve closed
5/2/2011	6:41:00 PM	BCl3 valve closed
5/2/2011	6:41:00 PM	PH3 valve closed
5/2/2011	6:41:00 PM	SiCl4 pre valve closed
5/2/2011	6:41:00 PM	SiCl4 post valve closed
5/2/2011	6:41:00 PM	Bubbler valve closed
5/2/2011	6:41:00 PM	Main Vac valve opened
5/2/2011	6:41:00 PM	Bypass valve opened
5/2/2011	6:41:00 PM	Helium MFC set to  0.000000
5/2/2011	6:41:00 PM	H2 MFC set to  0.000000
5/2/2011	6:41:00 PM	BCl3 MFC set to  0.000000
5/2/2011	6:41:00 PM	PHl3 MFC set to  0.000000
5/2/2011	6:41:00 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:41:00 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:41:00 PM	Tube furnace set to 0
5/2/2011	6:41:00 PM	Run finished at 6:41 PM
5/2/2011	6:41:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	6:41:39 PM	Recipe started at 6:41 PM
5/2/2011	6:41:39 PM	Helium valve closed
5/2/2011	6:41:39 PM	BCl3 valve closed
5/2/2011	6:41:39 PM	PH3 valve closed
5/2/2011	6:41:39 PM	SiCl4 pre valve closed
5/2/2011	6:41:39 PM	SiCl4 post valve closed
5/2/2011	6:41:39 PM	Main Vac valve closed
5/2/2011	6:41:39 PM	Bypass valve closed
5/2/2011	6:41:39 PM	Bubbler valve closed
5/2/2011	6:41:39 PM	H2 valve opened
5/2/2011	6:41:39 PM	Helium MFC set to  0.000000
5/2/2011	6:41:39 PM	H2 MFC set to  500.000000
5/2/2011	6:41:39 PM	BCl3 MFC set to  0.000000
5/2/2011	6:41:39 PM	PHl3 MFC set to  0.000000
5/2/2011	6:41:39 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:41:39 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:41:39 PM	Tube furnace set to 0
5/2/2011	6:42:19 PM	Run aborted at 6:42 PM
5/2/2011	6:42:19 PM	Helium valve closed
5/2/2011	6:42:19 PM	H2 valve closed
5/2/2011	6:42:19 PM	BCl3 valve closed
5/2/2011	6:42:19 PM	PH3 valve closed
5/2/2011	6:42:19 PM	SiCl4 pre valve closed
5/2/2011	6:42:19 PM	SiCl4 post valve closed
5/2/2011	6:42:19 PM	Bypass valve closed
5/2/2011	6:42:19 PM	Main Vac valve closed
5/2/2011	6:42:19 PM	Bubbler valve closed
5/2/2011	6:42:19 PM	Helium MFC set to  0.000000
5/2/2011	6:42:19 PM	H2 MFC set to  0.000000
5/2/2011	6:42:19 PM	BCl3 MFC set to  0.000000
5/2/2011	6:42:19 PM	PHl3 MFC set to  0.000000
5/2/2011	6:42:19 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:42:20 PM	Tube furnace set to 0
5/2/2011	6:42:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	6:42:23 PM	Recipe started at 6:42 PM
5/2/2011	6:42:23 PM	Helium valve closed
5/2/2011	6:42:23 PM	H2 valve closed
5/2/2011	6:42:23 PM	BCl3 valve closed
5/2/2011	6:42:23 PM	PH3 valve closed
5/2/2011	6:42:23 PM	SiCl4 pre valve closed
5/2/2011	6:42:23 PM	SiCl4 post valve closed
5/2/2011	6:42:23 PM	Main Vac valve closed
5/2/2011	6:42:23 PM	Bubbler valve closed
5/2/2011	6:42:23 PM	Bypass valve opened
5/2/2011	6:42:23 PM	Helium MFC set to  0.000000
5/2/2011	6:42:23 PM	H2 MFC set to  0.000000
5/2/2011	6:42:23 PM	BCl3 MFC set to  0.000000
5/2/2011	6:42:23 PM	PHl3 MFC set to  0.000000
5/2/2011	6:42:23 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:42:23 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:42:23 PM	Tube furnace set to 0
5/2/2011	6:42:35 PM	Helium valve closed
5/2/2011	6:42:35 PM	H2 valve closed
5/2/2011	6:42:35 PM	BCl3 valve closed
5/2/2011	6:42:35 PM	PH3 valve closed
5/2/2011	6:42:35 PM	SiCl4 pre valve closed
5/2/2011	6:42:35 PM	SiCl4 post valve closed
5/2/2011	6:42:35 PM	Bubbler valve closed
5/2/2011	6:42:35 PM	Main Vac valve opened
5/2/2011	6:42:35 PM	Bypass valve opened
5/2/2011	6:42:35 PM	Helium MFC set to  0.000000
5/2/2011	6:42:35 PM	H2 MFC set to  0.000000
5/2/2011	6:42:35 PM	BCl3 MFC set to  0.000000
5/2/2011	6:42:35 PM	PHl3 MFC set to  0.000000
5/2/2011	6:42:35 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:42:35 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:42:35 PM	Tube furnace set to 0
5/2/2011	6:42:35 PM	Run finished at 6:42 PM
5/2/2011	6:42:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	6:43:09 PM	Recipe started at 6:43 PM
5/2/2011	6:43:09 PM	Helium valve closed
5/2/2011	6:43:09 PM	BCl3 valve closed
5/2/2011	6:43:09 PM	PH3 valve closed
5/2/2011	6:43:09 PM	SiCl4 pre valve closed
5/2/2011	6:43:09 PM	SiCl4 post valve closed
5/2/2011	6:43:09 PM	Main Vac valve closed
5/2/2011	6:43:09 PM	Bypass valve closed
5/2/2011	6:43:09 PM	Bubbler valve closed
5/2/2011	6:43:09 PM	H2 valve opened
5/2/2011	6:43:09 PM	Helium MFC set to  0.000000
5/2/2011	6:43:09 PM	H2 MFC set to  500.000000
5/2/2011	6:43:09 PM	BCl3 MFC set to  0.000000
5/2/2011	6:43:09 PM	PHl3 MFC set to  0.000000
5/2/2011	6:43:09 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:43:09 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:43:09 PM	Tube furnace set to 0
5/2/2011	6:44:31 PM	Helium valve closed
5/2/2011	6:44:31 PM	BCl3 valve closed
5/2/2011	6:44:31 PM	PH3 valve closed
5/2/2011	6:44:31 PM	SiCl4 pre valve closed
5/2/2011	6:44:31 PM	SiCl4 post valve closed
5/2/2011	6:44:31 PM	Main Vac valve closed
5/2/2011	6:44:31 PM	Bypass valve closed
5/2/2011	6:44:31 PM	H2 valve opened
5/2/2011	6:44:31 PM	Bubbler valve opened
5/2/2011	6:44:31 PM	Helium MFC set to  0.000000
5/2/2011	6:44:31 PM	H2 MFC set to  500.000000
5/2/2011	6:44:31 PM	BCl3 MFC set to  0.000000
5/2/2011	6:44:31 PM	PHl3 MFC set to  0.000000
5/2/2011	6:44:31 PM	SiCl4 MFC set to  0.000000
5/2/2011	6:44:31 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	6:44:31 PM	Tube furnace set to 1000
5/2/2011	7:04:31 PM	Helium valve closed
5/2/2011	7:04:31 PM	PH3 valve closed
5/2/2011	7:04:31 PM	Main Vac valve closed
5/2/2011	7:04:31 PM	Bypass valve closed
5/2/2011	7:04:31 PM	H2 valve opened
5/2/2011	7:04:31 PM	BCl3 valve opened
5/2/2011	7:04:31 PM	SiCl4 pre valve opened
5/2/2011	7:04:31 PM	SiCl4 post valve opened
5/2/2011	7:04:31 PM	Bubbler valve opened
5/2/2011	7:04:31 PM	Helium MFC set to  0.000000
5/2/2011	7:04:31 PM	H2 MFC set to  500.000000
5/2/2011	7:04:31 PM	BCl3 MFC set to  5.000000
5/2/2011	7:04:31 PM	PHl3 MFC set to  0.000000
5/2/2011	7:04:31 PM	SiCl4 MFC set to  50.000000
5/2/2011	7:04:31 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	7:04:31 PM	Tube furnace set to 1000
5/2/2011	7:19:31 PM	H2 valve closed
5/2/2011	7:19:31 PM	BCl3 valve closed
5/2/2011	7:19:31 PM	PH3 valve closed
5/2/2011	7:19:31 PM	SiCl4 pre valve closed
5/2/2011	7:19:31 PM	SiCl4 post valve closed
5/2/2011	7:19:31 PM	Main Vac valve closed
5/2/2011	7:19:31 PM	Bypass valve closed
5/2/2011	7:19:31 PM	Helium valve opened
5/2/2011	7:19:31 PM	Bubbler valve opened
5/2/2011	7:19:31 PM	Helium MFC set to  500.000000
5/2/2011	7:19:31 PM	H2 MFC set to  0.000000
5/2/2011	7:19:31 PM	BCl3 MFC set to  0.000000
5/2/2011	7:19:31 PM	PHl3 MFC set to  0.000000
5/2/2011	7:19:31 PM	SiCl4 MFC set to  0.000000
5/2/2011	7:19:31 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	7:19:32 PM	Tube furnace set to 0
5/2/2011	7:39:32 PM	Helium valve closed
5/2/2011	7:39:32 PM	H2 valve closed
5/2/2011	7:39:32 PM	BCl3 valve closed
5/2/2011	7:39:32 PM	PH3 valve closed
5/2/2011	7:39:32 PM	SiCl4 pre valve closed
5/2/2011	7:39:32 PM	SiCl4 post valve closed
5/2/2011	7:39:32 PM	Main Vac valve closed
5/2/2011	7:39:32 PM	Bypass valve closed
5/2/2011	7:39:32 PM	Bubbler valve closed
5/2/2011	7:39:32 PM	Helium MFC set to  0.000000
5/2/2011	7:39:32 PM	H2 MFC set to  0.000000
5/2/2011	7:39:32 PM	BCl3 MFC set to  0.000000
5/2/2011	7:39:32 PM	PHl3 MFC set to  0.000000
5/2/2011	7:39:32 PM	SiCl4 MFC set to  0.000000
5/2/2011	7:39:32 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	7:39:32 PM	Tube furnace set to 0
5/2/2011	7:39:32 PM	Run finished at 7:39 PM
5/2/2011	7:39:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/2/2011	7:40:04 PM	Recipe started at 7:39 PM
5/2/2011	7:40:04 PM	Helium valve closed
5/2/2011	7:40:04 PM	H2 valve closed
5/2/2011	7:40:04 PM	BCl3 valve closed
5/2/2011	7:40:04 PM	PH3 valve closed
5/2/2011	7:40:04 PM	SiCl4 pre valve closed
5/2/2011	7:40:04 PM	SiCl4 post valve closed
5/2/2011	7:40:04 PM	Main Vac valve closed
5/2/2011	7:40:04 PM	Bubbler valve closed
5/2/2011	7:40:04 PM	Bypass valve opened
5/2/2011	7:40:04 PM	Helium MFC set to  0.000000
5/2/2011	7:40:04 PM	H2 MFC set to  0.000000
5/2/2011	7:40:04 PM	BCl3 MFC set to  0.000000
5/2/2011	7:40:04 PM	PHl3 MFC set to  0.000000
5/2/2011	7:40:04 PM	SiCl4 MFC set to  0.000000
5/2/2011	7:40:04 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	7:40:04 PM	Tube furnace set to 0
5/2/2011	7:40:27 PM	Helium valve closed
5/2/2011	7:40:27 PM	H2 valve closed
5/2/2011	7:40:27 PM	BCl3 valve closed
5/2/2011	7:40:27 PM	PH3 valve closed
5/2/2011	7:40:27 PM	SiCl4 pre valve closed
5/2/2011	7:40:27 PM	SiCl4 post valve closed
5/2/2011	7:40:27 PM	Bubbler valve closed
5/2/2011	7:40:27 PM	Main Vac valve opened
5/2/2011	7:40:27 PM	Bypass valve opened
5/2/2011	7:40:27 PM	Helium MFC set to  0.000000
5/2/2011	7:40:27 PM	H2 MFC set to  0.000000
5/2/2011	7:40:27 PM	BCl3 MFC set to  0.000000
5/2/2011	7:40:27 PM	PHl3 MFC set to  0.000000
5/2/2011	7:40:27 PM	SiCl4 MFC set to  0.000000
5/2/2011	7:40:27 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	7:40:27 PM	Tube furnace set to 0
5/2/2011	7:40:42 PM	Run aborted at 7:40 PM
5/2/2011	7:40:42 PM	Helium valve closed
5/2/2011	7:40:42 PM	H2 valve closed
5/2/2011	7:40:42 PM	BCl3 valve closed
5/2/2011	7:40:42 PM	PH3 valve closed
5/2/2011	7:40:42 PM	SiCl4 pre valve closed
5/2/2011	7:40:42 PM	SiCl4 post valve closed
5/2/2011	7:40:42 PM	Bypass valve closed
5/2/2011	7:40:42 PM	Main Vac valve closed
5/2/2011	7:40:42 PM	Bubbler valve closed
5/2/2011	7:40:42 PM	Helium MFC set to  0.000000
5/2/2011	7:40:42 PM	H2 MFC set to  0.000000
5/2/2011	7:40:42 PM	BCl3 MFC set to  0.000000
5/2/2011	7:40:42 PM	PHl3 MFC set to  0.000000
5/2/2011	7:40:42 PM	SiCl4 MFC set to  0.000000
5/2/2011	7:40:42 PM	Tube furnace set to 0
5/2/2011	7:40:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/2/2011	7:40:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/2/2011	7:40:47 PM	Recipe started at 7:40 PM
5/2/2011	7:40:47 PM	H2 valve closed
5/2/2011	7:40:47 PM	BCl3 valve closed
5/2/2011	7:40:47 PM	PH3 valve closed
5/2/2011	7:40:47 PM	SiCl4 pre valve closed
5/2/2011	7:40:47 PM	SiCl4 post valve closed
5/2/2011	7:40:47 PM	Main Vac valve closed
5/2/2011	7:40:47 PM	Bypass valve closed
5/2/2011	7:40:47 PM	Bubbler valve closed
5/2/2011	7:40:47 PM	Helium valve opened
5/2/2011	7:40:47 PM	Helium MFC set to  500.000000
5/2/2011	7:40:47 PM	H2 MFC set to  0.000000
5/2/2011	7:40:47 PM	BCl3 MFC set to  0.000000
5/2/2011	7:40:47 PM	PHl3 MFC set to  0.000000
5/2/2011	7:40:47 PM	SiCl4 MFC set to  0.000000
5/2/2011	7:40:47 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	7:40:47 PM	Tube furnace set to 0
5/2/2011	7:42:00 PM	Helium valve closed
5/2/2011	7:42:00 PM	H2 valve closed
5/2/2011	7:42:00 PM	BCl3 valve closed
5/2/2011	7:42:00 PM	PH3 valve closed
5/2/2011	7:42:00 PM	SiCl4 pre valve closed
5/2/2011	7:42:00 PM	SiCl4 post valve closed
5/2/2011	7:42:00 PM	Main Vac valve closed
5/2/2011	7:42:00 PM	Bypass valve closed
5/2/2011	7:42:00 PM	Bubbler valve closed
5/2/2011	7:42:00 PM	Helium MFC set to  0.000000
5/2/2011	7:42:00 PM	H2 MFC set to  0.000000
5/2/2011	7:42:00 PM	BCl3 MFC set to  0.000000
5/2/2011	7:42:00 PM	PHl3 MFC set to  0.000000
5/2/2011	7:42:00 PM	SiCl4 MFC set to  0.000000
5/2/2011	7:42:00 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	7:42:00 PM	Tube furnace set to 0
5/2/2011	7:42:00 PM	Run finished at 7:42 PM
5/2/2011	7:42:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/2/2011	7:53:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	7:53:02 PM	Recipe started at 7:53 PM
5/2/2011	7:53:02 PM	Helium valve closed
5/2/2011	7:53:02 PM	H2 valve closed
5/2/2011	7:53:02 PM	BCl3 valve closed
5/2/2011	7:53:02 PM	PH3 valve closed
5/2/2011	7:53:02 PM	SiCl4 pre valve closed
5/2/2011	7:53:02 PM	SiCl4 post valve closed
5/2/2011	7:53:02 PM	Main Vac valve closed
5/2/2011	7:53:02 PM	Bubbler valve closed
5/2/2011	7:53:02 PM	Bypass valve opened
5/2/2011	7:53:02 PM	Helium MFC set to  0.000000
5/2/2011	7:53:02 PM	H2 MFC set to  0.000000
5/2/2011	7:53:02 PM	BCl3 MFC set to  0.000000
5/2/2011	7:53:02 PM	PHl3 MFC set to  0.000000
5/2/2011	7:53:02 PM	SiCl4 MFC set to  0.000000
5/2/2011	7:53:02 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	7:53:02 PM	Tube furnace set to 0
5/2/2011	7:53:32 PM	Helium valve closed
5/2/2011	7:53:32 PM	H2 valve closed
5/2/2011	7:53:32 PM	BCl3 valve closed
5/2/2011	7:53:32 PM	PH3 valve closed
5/2/2011	7:53:32 PM	SiCl4 pre valve closed
5/2/2011	7:53:32 PM	SiCl4 post valve closed
5/2/2011	7:53:32 PM	Bubbler valve closed
5/2/2011	7:53:32 PM	Main Vac valve opened
5/2/2011	7:53:32 PM	Bypass valve opened
5/2/2011	7:53:32 PM	Helium MFC set to  0.000000
5/2/2011	7:53:32 PM	H2 MFC set to  0.000000
5/2/2011	7:53:32 PM	BCl3 MFC set to  0.000000
5/2/2011	7:53:32 PM	PHl3 MFC set to  0.000000
5/2/2011	7:53:32 PM	SiCl4 MFC set to  0.000000
5/2/2011	7:53:32 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	7:53:32 PM	Tube furnace set to 0
5/2/2011	7:53:33 PM	Run finished at 7:53 PM
5/2/2011	7:53:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	7:56:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/2/2011	7:56:48 PM	Recipe started at 7:56 PM
5/2/2011	7:56:48 PM	Helium valve closed
5/2/2011	7:56:48 PM	H2 valve closed
5/2/2011	7:56:48 PM	BCl3 valve closed
5/2/2011	7:56:48 PM	PH3 valve closed
5/2/2011	7:56:48 PM	SiCl4 pre valve closed
5/2/2011	7:56:48 PM	SiCl4 post valve closed
5/2/2011	7:56:48 PM	Main Vac valve closed
5/2/2011	7:56:48 PM	Bypass valve closed
5/2/2011	7:56:48 PM	Bubbler valve closed
5/2/2011	7:56:48 PM	Helium MFC set to  0.000000
5/2/2011	7:56:48 PM	H2 MFC set to  0.000000
5/2/2011	7:56:48 PM	BCl3 MFC set to  0.000000
5/2/2011	7:56:48 PM	PHl3 MFC set to  0.000000
5/2/2011	7:56:48 PM	SiCl4 MFC set to  0.000000
5/2/2011	7:56:48 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	7:56:48 PM	Tube furnace set to 0
5/2/2011	7:56:48 PM	Run finished at 7:56 PM
5/2/2011	7:56:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/2/2011	8:57:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/2/2011	8:57:17 PM	Recipe started at 8:57 PM
5/2/2011	8:57:17 PM	H2 valve closed
5/2/2011	8:57:17 PM	BCl3 valve closed
5/2/2011	8:57:17 PM	PH3 valve closed
5/2/2011	8:57:17 PM	SiCl4 pre valve closed
5/2/2011	8:57:17 PM	SiCl4 post valve closed
5/2/2011	8:57:17 PM	Main Vac valve closed
5/2/2011	8:57:17 PM	Bypass valve closed
5/2/2011	8:57:17 PM	Bubbler valve closed
5/2/2011	8:57:17 PM	Helium valve opened
5/2/2011	8:57:17 PM	Helium MFC set to  500.000000
5/2/2011	8:57:17 PM	H2 MFC set to  0.000000
5/2/2011	8:57:17 PM	BCl3 MFC set to  0.000000
5/2/2011	8:57:17 PM	PHl3 MFC set to  0.000000
5/2/2011	8:57:17 PM	SiCl4 MFC set to  0.000000
5/2/2011	8:57:17 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	8:57:17 PM	Tube furnace set to 0
5/2/2011	8:58:47 PM	Run aborted at 8:58 PM
5/2/2011	8:58:47 PM	Helium valve closed
5/2/2011	8:58:47 PM	H2 valve closed
5/2/2011	8:58:47 PM	BCl3 valve closed
5/2/2011	8:58:47 PM	PH3 valve closed
5/2/2011	8:58:47 PM	SiCl4 pre valve closed
5/2/2011	8:58:47 PM	SiCl4 post valve closed
5/2/2011	8:58:47 PM	Bypass valve closed
5/2/2011	8:58:47 PM	Main Vac valve closed
5/2/2011	8:58:47 PM	Bubbler valve closed
5/2/2011	8:58:47 PM	Helium MFC set to  0.000000
5/2/2011	8:58:47 PM	H2 MFC set to  0.000000
5/2/2011	8:58:47 PM	BCl3 MFC set to  0.000000
5/2/2011	8:58:47 PM	PHl3 MFC set to  0.000000
5/2/2011	8:58:47 PM	SiCl4 MFC set to  0.000000
5/2/2011	8:58:47 PM	Tube furnace set to 0
5/2/2011	8:58:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/2/2011	9:57:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/2/2011	9:57:40 PM	Recipe started at 9:57 PM
5/2/2011	9:57:40 PM	H2 valve closed
5/2/2011	9:57:40 PM	BCl3 valve closed
5/2/2011	9:57:40 PM	PH3 valve closed
5/2/2011	9:57:40 PM	SiCl4 pre valve closed
5/2/2011	9:57:40 PM	SiCl4 post valve closed
5/2/2011	9:57:40 PM	Main Vac valve closed
5/2/2011	9:57:40 PM	Bypass valve closed
5/2/2011	9:57:40 PM	Bubbler valve closed
5/2/2011	9:57:40 PM	Helium valve opened
5/2/2011	9:57:40 PM	Helium MFC set to  500.000000
5/2/2011	9:57:40 PM	H2 MFC set to  0.000000
5/2/2011	9:57:40 PM	BCl3 MFC set to  0.000000
5/2/2011	9:57:40 PM	PHl3 MFC set to  0.000000
5/2/2011	9:57:40 PM	SiCl4 MFC set to  0.000000
5/2/2011	9:57:40 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	9:57:40 PM	Tube furnace set to 0
5/2/2011	9:58:00 PM	Run aborted at 9:58 PM
5/2/2011	9:58:00 PM	Helium valve closed
5/2/2011	9:58:00 PM	H2 valve closed
5/2/2011	9:58:00 PM	BCl3 valve closed
5/2/2011	9:58:00 PM	PH3 valve closed
5/2/2011	9:58:00 PM	SiCl4 pre valve closed
5/2/2011	9:58:00 PM	SiCl4 post valve closed
5/2/2011	9:58:00 PM	Bypass valve closed
5/2/2011	9:58:00 PM	Main Vac valve closed
5/2/2011	9:58:00 PM	Bubbler valve closed
5/2/2011	9:58:00 PM	Helium MFC set to  0.000000
5/2/2011	9:58:00 PM	H2 MFC set to  0.000000
5/2/2011	9:58:00 PM	BCl3 MFC set to  0.000000
5/2/2011	9:58:00 PM	PHl3 MFC set to  0.000000
5/2/2011	9:58:00 PM	SiCl4 MFC set to  0.000000
5/2/2011	9:58:00 PM	Tube furnace set to 0
5/2/2011	9:58:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/2/2011	9:58:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/2/2011	9:58:48 PM	Recipe started at 9:58 PM
5/2/2011	9:58:48 PM	H2 valve closed
5/2/2011	9:58:48 PM	BCl3 valve closed
5/2/2011	9:58:48 PM	PH3 valve closed
5/2/2011	9:58:48 PM	SiCl4 pre valve closed
5/2/2011	9:58:48 PM	SiCl4 post valve closed
5/2/2011	9:58:48 PM	Main Vac valve closed
5/2/2011	9:58:48 PM	Bypass valve closed
5/2/2011	9:58:48 PM	Bubbler valve closed
5/2/2011	9:58:48 PM	Helium valve opened
5/2/2011	9:58:48 PM	Helium MFC set to  500.000000
5/2/2011	9:58:48 PM	H2 MFC set to  0.000000
5/2/2011	9:58:48 PM	BCl3 MFC set to  0.000000
5/2/2011	9:58:48 PM	PHl3 MFC set to  0.000000
5/2/2011	9:58:48 PM	SiCl4 MFC set to  0.000000
5/2/2011	9:58:48 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	9:58:48 PM	Tube furnace set to 0
5/2/2011	9:59:23 PM	Helium valve closed
5/2/2011	9:59:23 PM	H2 valve closed
5/2/2011	9:59:23 PM	BCl3 valve closed
5/2/2011	9:59:23 PM	PH3 valve closed
5/2/2011	9:59:23 PM	SiCl4 pre valve closed
5/2/2011	9:59:23 PM	SiCl4 post valve closed
5/2/2011	9:59:23 PM	Main Vac valve closed
5/2/2011	9:59:23 PM	Bypass valve closed
5/2/2011	9:59:23 PM	Bubbler valve closed
5/2/2011	9:59:23 PM	Helium MFC set to  0.000000
5/2/2011	9:59:23 PM	H2 MFC set to  0.000000
5/2/2011	9:59:23 PM	BCl3 MFC set to  0.000000
5/2/2011	9:59:23 PM	PHl3 MFC set to  0.000000
5/2/2011	9:59:23 PM	SiCl4 MFC set to  0.000000
5/2/2011	9:59:23 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	9:59:23 PM	Tube furnace set to 0
5/2/2011	9:59:23 PM	Run finished at 9:59 PM
5/2/2011	9:59:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/2/2011	10:02:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	10:02:36 PM	Recipe started at 10:02 PM
5/2/2011	10:02:36 PM	Helium valve closed
5/2/2011	10:02:36 PM	H2 valve closed
5/2/2011	10:02:36 PM	BCl3 valve closed
5/2/2011	10:02:36 PM	PH3 valve closed
5/2/2011	10:02:36 PM	SiCl4 pre valve closed
5/2/2011	10:02:36 PM	SiCl4 post valve closed
5/2/2011	10:02:36 PM	Main Vac valve closed
5/2/2011	10:02:37 PM	Bubbler valve closed
5/2/2011	10:02:37 PM	Bypass valve opened
5/2/2011	10:02:37 PM	Helium MFC set to  0.000000
5/2/2011	10:02:37 PM	H2 MFC set to  0.000000
5/2/2011	10:02:37 PM	BCl3 MFC set to  0.000000
5/2/2011	10:02:37 PM	PHl3 MFC set to  0.000000
5/2/2011	10:02:37 PM	SiCl4 MFC set to  0.000000
5/2/2011	10:02:37 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	10:02:37 PM	Tube furnace set to 0
5/2/2011	10:03:09 PM	Helium valve closed
5/2/2011	10:03:09 PM	H2 valve closed
5/2/2011	10:03:09 PM	BCl3 valve closed
5/2/2011	10:03:09 PM	PH3 valve closed
5/2/2011	10:03:09 PM	SiCl4 pre valve closed
5/2/2011	10:03:09 PM	SiCl4 post valve closed
5/2/2011	10:03:09 PM	Bubbler valve closed
5/2/2011	10:03:09 PM	Main Vac valve opened
5/2/2011	10:03:09 PM	Bypass valve opened
5/2/2011	10:03:09 PM	Helium MFC set to  0.000000
5/2/2011	10:03:09 PM	H2 MFC set to  0.000000
5/2/2011	10:03:09 PM	BCl3 MFC set to  0.000000
5/2/2011	10:03:09 PM	PHl3 MFC set to  0.000000
5/2/2011	10:03:09 PM	SiCl4 MFC set to  0.000000
5/2/2011	10:03:09 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	10:03:09 PM	Tube furnace set to 0
5/2/2011	10:03:09 PM	Run finished at 10:03 PM
5/2/2011	10:03:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	10:35:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/2/2011	10:35:00 PM	Recipe started at 10:35 PM
5/2/2011	10:35:00 PM	H2 valve closed
5/2/2011	10:35:00 PM	BCl3 valve closed
5/2/2011	10:35:00 PM	PH3 valve closed
5/2/2011	10:35:00 PM	SiCl4 pre valve closed
5/2/2011	10:35:00 PM	SiCl4 post valve closed
5/2/2011	10:35:00 PM	Main Vac valve closed
5/2/2011	10:35:00 PM	Bypass valve closed
5/2/2011	10:35:00 PM	Bubbler valve closed
5/2/2011	10:35:00 PM	Helium valve opened
5/2/2011	10:35:00 PM	Helium MFC set to  500.000000
5/2/2011	10:35:00 PM	H2 MFC set to  0.000000
5/2/2011	10:35:00 PM	BCl3 MFC set to  0.000000
5/2/2011	10:35:00 PM	PHl3 MFC set to  0.000000
5/2/2011	10:35:00 PM	SiCl4 MFC set to  0.000000
5/2/2011	10:35:00 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	10:35:00 PM	Tube furnace set to 0
5/2/2011	10:36:20 PM	Helium valve closed
5/2/2011	10:36:20 PM	H2 valve closed
5/2/2011	10:36:20 PM	BCl3 valve closed
5/2/2011	10:36:20 PM	PH3 valve closed
5/2/2011	10:36:20 PM	SiCl4 pre valve closed
5/2/2011	10:36:20 PM	SiCl4 post valve closed
5/2/2011	10:36:20 PM	Main Vac valve closed
5/2/2011	10:36:20 PM	Bypass valve closed
5/2/2011	10:36:20 PM	Bubbler valve closed
5/2/2011	10:36:20 PM	Helium MFC set to  0.000000
5/2/2011	10:36:20 PM	H2 MFC set to  0.000000
5/2/2011	10:36:20 PM	BCl3 MFC set to  0.000000
5/2/2011	10:36:20 PM	PHl3 MFC set to  0.000000
5/2/2011	10:36:20 PM	SiCl4 MFC set to  0.000000
5/2/2011	10:36:20 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	10:36:21 PM	Tube furnace set to 0
5/2/2011	10:36:21 PM	Run finished at 10:36 PM
5/2/2011	10:36:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/2/2011	10:40:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	10:40:32 PM	Recipe started at 10:40 PM
5/2/2011	10:40:32 PM	Helium valve closed
5/2/2011	10:40:32 PM	H2 valve closed
5/2/2011	10:40:32 PM	BCl3 valve closed
5/2/2011	10:40:32 PM	PH3 valve closed
5/2/2011	10:40:32 PM	SiCl4 pre valve closed
5/2/2011	10:40:32 PM	SiCl4 post valve closed
5/2/2011	10:40:32 PM	Main Vac valve closed
5/2/2011	10:40:32 PM	Bubbler valve closed
5/2/2011	10:40:32 PM	Bypass valve opened
5/2/2011	10:40:32 PM	Helium MFC set to  0.000000
5/2/2011	10:40:32 PM	H2 MFC set to  0.000000
5/2/2011	10:40:32 PM	BCl3 MFC set to  0.000000
5/2/2011	10:40:32 PM	PHl3 MFC set to  0.000000
5/2/2011	10:40:32 PM	SiCl4 MFC set to  0.000000
5/2/2011	10:40:32 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	10:40:32 PM	Tube furnace set to 0
5/2/2011	10:41:04 PM	Helium valve closed
5/2/2011	10:41:04 PM	H2 valve closed
5/2/2011	10:41:04 PM	BCl3 valve closed
5/2/2011	10:41:04 PM	PH3 valve closed
5/2/2011	10:41:04 PM	SiCl4 pre valve closed
5/2/2011	10:41:04 PM	SiCl4 post valve closed
5/2/2011	10:41:04 PM	Bubbler valve closed
5/2/2011	10:41:04 PM	Main Vac valve opened
5/2/2011	10:41:04 PM	Bypass valve opened
5/2/2011	10:41:04 PM	Helium MFC set to  0.000000
5/2/2011	10:41:04 PM	H2 MFC set to  0.000000
5/2/2011	10:41:04 PM	BCl3 MFC set to  0.000000
5/2/2011	10:41:04 PM	PHl3 MFC set to  0.000000
5/2/2011	10:41:04 PM	SiCl4 MFC set to  0.000000
5/2/2011	10:41:04 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	10:41:04 PM	Tube furnace set to 0
5/2/2011	10:41:05 PM	Run finished at 10:41 PM
5/2/2011	10:41:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	10:41:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/2/2011	10:41:19 PM	Recipe started at 10:41 PM
5/2/2011	10:41:19 PM	Helium valve closed
5/2/2011	10:41:19 PM	H2 valve closed
5/2/2011	10:41:19 PM	BCl3 valve closed
5/2/2011	10:41:19 PM	PH3 valve closed
5/2/2011	10:41:19 PM	SiCl4 pre valve closed
5/2/2011	10:41:19 PM	SiCl4 post valve closed
5/2/2011	10:41:19 PM	Main Vac valve closed
5/2/2011	10:41:19 PM	Bubbler valve closed
5/2/2011	10:41:19 PM	Bypass valve opened
5/2/2011	10:41:19 PM	Helium MFC set to  0.000000
5/2/2011	10:41:19 PM	H2 MFC set to  0.000000
5/2/2011	10:41:19 PM	BCl3 MFC set to  0.000000
5/2/2011	10:41:19 PM	PHl3 MFC set to  0.000000
5/2/2011	10:41:19 PM	SiCl4 MFC set to  0.000000
5/2/2011	10:41:19 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	10:41:19 PM	Tube furnace set to 0
5/2/2011	10:41:19 PM	Helium valve closed
5/2/2011	10:41:19 PM	H2 valve closed
5/2/2011	10:41:19 PM	BCl3 valve closed
5/2/2011	10:41:19 PM	PH3 valve closed
5/2/2011	10:41:19 PM	SiCl4 pre valve closed
5/2/2011	10:41:19 PM	SiCl4 post valve closed
5/2/2011	10:41:19 PM	Bubbler valve closed
5/2/2011	10:41:19 PM	Main Vac valve opened
5/2/2011	10:41:19 PM	Bypass valve opened
5/2/2011	10:41:19 PM	Helium MFC set to  0.000000
5/2/2011	10:41:19 PM	H2 MFC set to  0.000000
5/2/2011	10:41:19 PM	BCl3 MFC set to  0.000000
5/2/2011	10:41:19 PM	PHl3 MFC set to  0.000000
5/2/2011	10:41:19 PM	SiCl4 MFC set to  0.000000
5/2/2011	10:41:19 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	10:41:19 PM	Tube furnace set to 0
5/2/2011	10:42:19 PM	H2 valve closed
5/2/2011	10:42:19 PM	BCl3 valve closed
5/2/2011	10:42:19 PM	PH3 valve closed
5/2/2011	10:42:19 PM	SiCl4 pre valve closed
5/2/2011	10:42:19 PM	SiCl4 post valve closed
5/2/2011	10:42:19 PM	Bubbler valve closed
5/2/2011	10:42:19 PM	Helium valve opened
5/2/2011	10:42:19 PM	Main Vac valve opened
5/2/2011	10:42:19 PM	Bypass valve opened
5/2/2011	10:42:19 PM	Helium MFC set to  100.000000
5/2/2011	10:42:19 PM	H2 MFC set to  0.000000
5/2/2011	10:42:19 PM	BCl3 MFC set to  0.000000
5/2/2011	10:42:19 PM	PHl3 MFC set to  0.000000
5/2/2011	10:42:19 PM	SiCl4 MFC set to  0.000000
5/2/2011	10:42:19 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	10:42:19 PM	Tube furnace set to 0
5/2/2011	10:43:19 PM	Helium valve closed
5/2/2011	10:43:19 PM	H2 valve closed
5/2/2011	10:43:19 PM	BCl3 valve closed
5/2/2011	10:43:19 PM	PH3 valve closed
5/2/2011	10:43:19 PM	SiCl4 pre valve closed
5/2/2011	10:43:19 PM	SiCl4 post valve closed
5/2/2011	10:43:19 PM	Bubbler valve closed
5/2/2011	10:43:19 PM	Main Vac valve opened
5/2/2011	10:43:19 PM	Bypass valve opened
5/2/2011	10:43:19 PM	Helium MFC set to  0.000000
5/2/2011	10:43:19 PM	H2 MFC set to  0.000000
5/2/2011	10:43:19 PM	BCl3 MFC set to  0.000000
5/2/2011	10:43:19 PM	PHl3 MFC set to  0.000000
5/2/2011	10:43:19 PM	SiCl4 MFC set to  0.000000
5/2/2011	10:43:19 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	10:43:20 PM	Tube furnace set to 0
5/2/2011	10:44:20 PM	H2 valve closed
5/2/2011	10:44:20 PM	BCl3 valve closed
5/2/2011	10:44:20 PM	PH3 valve closed
5/2/2011	10:44:20 PM	SiCl4 pre valve closed
5/2/2011	10:44:20 PM	SiCl4 post valve closed
5/2/2011	10:44:20 PM	Bubbler valve closed
5/2/2011	10:44:20 PM	Helium valve opened
5/2/2011	10:44:20 PM	Main Vac valve opened
5/2/2011	10:44:20 PM	Bypass valve opened
5/2/2011	10:44:20 PM	Helium MFC set to  100.000000
5/2/2011	10:44:20 PM	H2 MFC set to  0.000000
5/2/2011	10:44:20 PM	BCl3 MFC set to  0.000000
5/2/2011	10:44:20 PM	PHl3 MFC set to  0.000000
5/2/2011	10:44:20 PM	SiCl4 MFC set to  0.000000
5/2/2011	10:44:20 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	10:44:20 PM	Tube furnace set to 0
5/2/2011	10:45:20 PM	Helium valve closed
5/2/2011	10:45:20 PM	H2 valve closed
5/2/2011	10:45:20 PM	BCl3 valve closed
5/2/2011	10:45:20 PM	PH3 valve closed
5/2/2011	10:45:20 PM	SiCl4 pre valve closed
5/2/2011	10:45:20 PM	SiCl4 post valve closed
5/2/2011	10:45:20 PM	Bubbler valve closed
5/2/2011	10:45:20 PM	Main Vac valve opened
5/2/2011	10:45:20 PM	Bypass valve opened
5/2/2011	10:45:20 PM	Helium MFC set to  0.000000
5/2/2011	10:45:20 PM	H2 MFC set to  0.000000
5/2/2011	10:45:20 PM	BCl3 MFC set to  0.000000
5/2/2011	10:45:20 PM	PHl3 MFC set to  0.000000
5/2/2011	10:45:20 PM	SiCl4 MFC set to  0.000000
5/2/2011	10:45:20 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	10:45:20 PM	Tube furnace set to 0
5/2/2011	10:46:20 PM	H2 valve closed
5/2/2011	10:46:20 PM	BCl3 valve closed
5/2/2011	10:46:20 PM	PH3 valve closed
5/2/2011	10:46:20 PM	SiCl4 pre valve closed
5/2/2011	10:46:20 PM	SiCl4 post valve closed
5/2/2011	10:46:20 PM	Bubbler valve closed
5/2/2011	10:46:20 PM	Helium valve opened
5/2/2011	10:46:20 PM	Main Vac valve opened
5/2/2011	10:46:20 PM	Bypass valve opened
5/2/2011	10:46:20 PM	Helium MFC set to  100.000000
5/2/2011	10:46:20 PM	H2 MFC set to  0.000000
5/2/2011	10:46:20 PM	BCl3 MFC set to  0.000000
5/2/2011	10:46:20 PM	PHl3 MFC set to  0.000000
5/2/2011	10:46:20 PM	SiCl4 MFC set to  0.000000
5/2/2011	10:46:20 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	10:46:20 PM	Tube furnace set to 0
5/2/2011	10:47:20 PM	Helium valve closed
5/2/2011	10:47:20 PM	H2 valve closed
5/2/2011	10:47:20 PM	BCl3 valve closed
5/2/2011	10:47:20 PM	PH3 valve closed
5/2/2011	10:47:20 PM	SiCl4 pre valve closed
5/2/2011	10:47:20 PM	SiCl4 post valve closed
5/2/2011	10:47:20 PM	Bubbler valve closed
5/2/2011	10:47:20 PM	Main Vac valve opened
5/2/2011	10:47:20 PM	Bypass valve opened
5/2/2011	10:47:20 PM	Helium MFC set to  0.000000
5/2/2011	10:47:20 PM	H2 MFC set to  0.000000
5/2/2011	10:47:20 PM	BCl3 MFC set to  0.000000
5/2/2011	10:47:20 PM	PHl3 MFC set to  0.000000
5/2/2011	10:47:20 PM	SiCl4 MFC set to  0.000000
5/2/2011	10:47:20 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	10:47:20 PM	Tube furnace set to 0
5/2/2011	10:48:20 PM	H2 valve closed
5/2/2011	10:48:20 PM	BCl3 valve closed
5/2/2011	10:48:20 PM	PH3 valve closed
5/2/2011	10:48:20 PM	SiCl4 pre valve closed
5/2/2011	10:48:20 PM	SiCl4 post valve closed
5/2/2011	10:48:20 PM	Bubbler valve closed
5/2/2011	10:48:20 PM	Helium valve opened
5/2/2011	10:48:20 PM	Main Vac valve opened
5/2/2011	10:48:20 PM	Bypass valve opened
5/2/2011	10:48:20 PM	Helium MFC set to  100.000000
5/2/2011	10:48:20 PM	H2 MFC set to  0.000000
5/2/2011	10:48:20 PM	BCl3 MFC set to  0.000000
5/2/2011	10:48:20 PM	PHl3 MFC set to  0.000000
5/2/2011	10:48:20 PM	SiCl4 MFC set to  0.000000
5/2/2011	10:48:20 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	10:48:21 PM	Tube furnace set to 0
5/2/2011	10:49:21 PM	Helium valve closed
5/2/2011	10:49:21 PM	H2 valve closed
5/2/2011	10:49:21 PM	BCl3 valve closed
5/2/2011	10:49:21 PM	PH3 valve closed
5/2/2011	10:49:21 PM	SiCl4 pre valve closed
5/2/2011	10:49:21 PM	SiCl4 post valve closed
5/2/2011	10:49:21 PM	Bubbler valve closed
5/2/2011	10:49:21 PM	Main Vac valve opened
5/2/2011	10:49:21 PM	Bypass valve opened
5/2/2011	10:49:21 PM	Helium MFC set to  0.000000
5/2/2011	10:49:21 PM	H2 MFC set to  0.000000
5/2/2011	10:49:21 PM	BCl3 MFC set to  0.000000
5/2/2011	10:49:21 PM	PHl3 MFC set to  0.000000
5/2/2011	10:49:21 PM	SiCl4 MFC set to  0.000000
5/2/2011	10:49:21 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	10:49:21 PM	Tube furnace set to 0
5/2/2011	10:49:42 PM	Run aborted at 10:49 PM
5/2/2011	10:49:42 PM	Helium valve closed
5/2/2011	10:49:42 PM	H2 valve closed
5/2/2011	10:49:42 PM	BCl3 valve closed
5/2/2011	10:49:42 PM	PH3 valve closed
5/2/2011	10:49:42 PM	SiCl4 pre valve closed
5/2/2011	10:49:42 PM	SiCl4 post valve closed
5/2/2011	10:49:42 PM	Bypass valve closed
5/2/2011	10:49:42 PM	Main Vac valve closed
5/2/2011	10:49:42 PM	Bubbler valve closed
5/2/2011	10:49:42 PM	Helium MFC set to  0.000000
5/2/2011	10:49:42 PM	H2 MFC set to  0.000000
5/2/2011	10:49:42 PM	BCl3 MFC set to  0.000000
5/2/2011	10:49:42 PM	PHl3 MFC set to  0.000000
5/2/2011	10:49:42 PM	SiCl4 MFC set to  0.000000
5/2/2011	10:49:42 PM	Tube furnace set to 0
5/2/2011	10:49:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/2/2011	10:49:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	10:49:45 PM	Recipe started at 10:49 PM
5/2/2011	10:49:45 PM	Helium valve closed
5/2/2011	10:49:45 PM	H2 valve closed
5/2/2011	10:49:45 PM	BCl3 valve closed
5/2/2011	10:49:45 PM	PH3 valve closed
5/2/2011	10:49:45 PM	SiCl4 pre valve closed
5/2/2011	10:49:45 PM	SiCl4 post valve closed
5/2/2011	10:49:45 PM	Main Vac valve closed
5/2/2011	10:49:45 PM	Bubbler valve closed
5/2/2011	10:49:45 PM	Bypass valve opened
5/2/2011	10:49:45 PM	Helium MFC set to  0.000000
5/2/2011	10:49:45 PM	H2 MFC set to  0.000000
5/2/2011	10:49:45 PM	BCl3 MFC set to  0.000000
5/2/2011	10:49:45 PM	PHl3 MFC set to  0.000000
5/2/2011	10:49:45 PM	SiCl4 MFC set to  0.000000
5/2/2011	10:49:45 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	10:49:45 PM	Tube furnace set to 0
5/2/2011	10:49:45 PM	Helium valve closed
5/2/2011	10:49:45 PM	H2 valve closed
5/2/2011	10:49:45 PM	BCl3 valve closed
5/2/2011	10:49:45 PM	PH3 valve closed
5/2/2011	10:49:45 PM	SiCl4 pre valve closed
5/2/2011	10:49:45 PM	SiCl4 post valve closed
5/2/2011	10:49:45 PM	Bubbler valve closed
5/2/2011	10:49:45 PM	Main Vac valve opened
5/2/2011	10:49:45 PM	Bypass valve opened
5/2/2011	10:49:45 PM	Helium MFC set to  0.000000
5/2/2011	10:49:45 PM	H2 MFC set to  0.000000
5/2/2011	10:49:45 PM	BCl3 MFC set to  0.000000
5/2/2011	10:49:45 PM	PHl3 MFC set to  0.000000
5/2/2011	10:49:45 PM	SiCl4 MFC set to  0.000000
5/2/2011	10:49:45 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	10:49:45 PM	Tube furnace set to 0
5/2/2011	10:49:45 PM	Run finished at 10:49 PM
5/2/2011	10:49:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2011	10:50:22 PM	Recipe started at 10:50 PM
5/2/2011	10:50:22 PM	BCl3 valve closed
5/2/2011	10:50:22 PM	PH3 valve closed
5/2/2011	10:50:22 PM	SiCl4 pre valve closed
5/2/2011	10:50:22 PM	SiCl4 post valve closed
5/2/2011	10:50:22 PM	Main Vac valve closed
5/2/2011	10:50:22 PM	Bypass valve closed
5/2/2011	10:50:22 PM	Bubbler valve closed
5/2/2011	10:50:22 PM	Helium valve opened
5/2/2011	10:50:22 PM	H2 valve opened
5/2/2011	10:50:22 PM	Helium MFC set to  190.000000
5/2/2011	10:50:22 PM	H2 MFC set to  10.000000
5/2/2011	10:50:22 PM	BCl3 MFC set to  0.000000
5/2/2011	10:50:22 PM	PHl3 MFC set to  0.000000
5/2/2011	10:50:22 PM	SiCl4 MFC set to  0.000000
5/2/2011	10:50:22 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	10:50:22 PM	Tube furnace set to 0
5/2/2011	10:53:46 PM	BCl3 valve closed
5/2/2011	10:53:46 PM	PH3 valve closed
5/2/2011	10:53:46 PM	SiCl4 pre valve closed
5/2/2011	10:53:46 PM	SiCl4 post valve closed
5/2/2011	10:53:46 PM	Main Vac valve closed
5/2/2011	10:53:46 PM	Bypass valve closed
5/2/2011	10:53:46 PM	Helium valve opened
5/2/2011	10:53:46 PM	H2 valve opened
5/2/2011	10:53:46 PM	Bubbler valve opened
5/2/2011	10:53:46 PM	Helium MFC set to  47.500000
5/2/2011	10:53:46 PM	H2 MFC set to  2.500000
5/2/2011	10:53:46 PM	BCl3 MFC set to  0.000000
5/2/2011	10:53:46 PM	PHl3 MFC set to  0.000000
5/2/2011	10:53:46 PM	SiCl4 MFC set to  0.000000
5/2/2011	10:53:46 PM	Bypass solenoid MFC set to  0.000000
5/2/2011	10:53:47 PM	Tube furnace set to 350
